JPS5927206A - 欠陥パタ−ン検出方法 - Google Patents

欠陥パタ−ン検出方法

Info

Publication number
JPS5927206A
JPS5927206A JP13755382A JP13755382A JPS5927206A JP S5927206 A JPS5927206 A JP S5927206A JP 13755382 A JP13755382 A JP 13755382A JP 13755382 A JP13755382 A JP 13755382A JP S5927206 A JPS5927206 A JP S5927206A
Authority
JP
Japan
Prior art keywords
image
value
defect
pattern detection
detection method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13755382A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0332723B2 (enrdf_load_stackoverflow
Inventor
Yozo Ouchi
大内　洋三
Haruo Yoda
晴夫 依田
Yutaka Sako
裕 酒匂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13755382A priority Critical patent/JPS5927206A/ja
Publication of JPS5927206A publication Critical patent/JPS5927206A/ja
Publication of JPH0332723B2 publication Critical patent/JPH0332723B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Sorting Of Articles (AREA)
JP13755382A 1982-08-06 1982-08-06 欠陥パタ−ン検出方法 Granted JPS5927206A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13755382A JPS5927206A (ja) 1982-08-06 1982-08-06 欠陥パタ−ン検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13755382A JPS5927206A (ja) 1982-08-06 1982-08-06 欠陥パタ−ン検出方法

Publications (2)

Publication Number Publication Date
JPS5927206A true JPS5927206A (ja) 1984-02-13
JPH0332723B2 JPH0332723B2 (enrdf_load_stackoverflow) 1991-05-14

Family

ID=15201398

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13755382A Granted JPS5927206A (ja) 1982-08-06 1982-08-06 欠陥パタ−ン検出方法

Country Status (1)

Country Link
JP (1) JPS5927206A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62163953A (ja) * 1985-12-27 1987-07-20 エイ・ティ・アンド・ティ・コーポレーション 製品を検査する方法と装置
JPH01176722A (ja) * 1987-12-31 1989-07-13 Jiro Sasaoka 沈降物の移送装置
JP2010256053A (ja) * 2009-04-22 2010-11-11 Visco Technologies Corp 形状欠損検査装置、形状モデリング装置および形状欠損検査プログラム
JP2011180120A (ja) * 2010-02-03 2011-09-15 Daiwa House Industry Co Ltd 防水シート診断方法および診断装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62163953A (ja) * 1985-12-27 1987-07-20 エイ・ティ・アンド・ティ・コーポレーション 製品を検査する方法と装置
JPH01176722A (ja) * 1987-12-31 1989-07-13 Jiro Sasaoka 沈降物の移送装置
JP2010256053A (ja) * 2009-04-22 2010-11-11 Visco Technologies Corp 形状欠損検査装置、形状モデリング装置および形状欠損検査プログラム
JP2011180120A (ja) * 2010-02-03 2011-09-15 Daiwa House Industry Co Ltd 防水シート診断方法および診断装置

Also Published As

Publication number Publication date
JPH0332723B2 (enrdf_load_stackoverflow) 1991-05-14

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