JPS5924202A - 表面欠陥検出装置 - Google Patents

表面欠陥検出装置

Info

Publication number
JPS5924202A
JPS5924202A JP13461182A JP13461182A JPS5924202A JP S5924202 A JPS5924202 A JP S5924202A JP 13461182 A JP13461182 A JP 13461182A JP 13461182 A JP13461182 A JP 13461182A JP S5924202 A JPS5924202 A JP S5924202A
Authority
JP
Japan
Prior art keywords
light
position sensor
address
scanning
bit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13461182A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6338083B2 (enrdf_load_stackoverflow
Inventor
Toshinori Inoue
敏範 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP13461182A priority Critical patent/JPS5924202A/ja
Publication of JPS5924202A publication Critical patent/JPS5924202A/ja
Publication of JPS6338083B2 publication Critical patent/JPS6338083B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP13461182A 1982-07-30 1982-07-30 表面欠陥検出装置 Granted JPS5924202A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13461182A JPS5924202A (ja) 1982-07-30 1982-07-30 表面欠陥検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13461182A JPS5924202A (ja) 1982-07-30 1982-07-30 表面欠陥検出装置

Publications (2)

Publication Number Publication Date
JPS5924202A true JPS5924202A (ja) 1984-02-07
JPS6338083B2 JPS6338083B2 (enrdf_load_stackoverflow) 1988-07-28

Family

ID=15132437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13461182A Granted JPS5924202A (ja) 1982-07-30 1982-07-30 表面欠陥検出装置

Country Status (1)

Country Link
JP (1) JPS5924202A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62137504A (ja) * 1985-12-10 1987-06-20 Sumitomo Special Metals Co Ltd 部分クラッド材の幅測定装置
JPS63177040A (ja) * 1987-01-19 1988-07-21 Nagoya Denki Kogyo Kk 実装済プリント基板自動検査装置
JPS63113949U (enrdf_load_stackoverflow) * 1987-01-19 1988-07-22

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4974815A (enrdf_load_stackoverflow) * 1972-11-20 1974-07-19
JPS54124784A (en) * 1978-03-20 1979-09-27 Ricoh Co Ltd Laser flaw inspector

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4974815A (enrdf_load_stackoverflow) * 1972-11-20 1974-07-19
JPS54124784A (en) * 1978-03-20 1979-09-27 Ricoh Co Ltd Laser flaw inspector

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62137504A (ja) * 1985-12-10 1987-06-20 Sumitomo Special Metals Co Ltd 部分クラッド材の幅測定装置
JPS63177040A (ja) * 1987-01-19 1988-07-21 Nagoya Denki Kogyo Kk 実装済プリント基板自動検査装置
JPS63113949U (enrdf_load_stackoverflow) * 1987-01-19 1988-07-22

Also Published As

Publication number Publication date
JPS6338083B2 (enrdf_load_stackoverflow) 1988-07-28

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