JPS54124784A - Laser flaw inspector - Google Patents

Laser flaw inspector

Info

Publication number
JPS54124784A
JPS54124784A JP3215278A JP3215278A JPS54124784A JP S54124784 A JPS54124784 A JP S54124784A JP 3215278 A JP3215278 A JP 3215278A JP 3215278 A JP3215278 A JP 3215278A JP S54124784 A JPS54124784 A JP S54124784A
Authority
JP
Japan
Prior art keywords
examined
scanning
image sensor
controller
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3215278A
Other languages
Japanese (ja)
Inventor
Hideo Segawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP3215278A priority Critical patent/JPS54124784A/en
Publication of JPS54124784A publication Critical patent/JPS54124784A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details

Abstract

PURPOSE:To detect minor flaw in object being examined and obtain position information of flaw at the same time, by detecting reflected light or transmitted light from the object being examined with a solid image sensor. CONSTITUTION:A laser beam 13 from a laser 12 is expanded by a beam expander 16 through mirrors 14, 15, and, after principal scanning with a rotating polyhedral mirror 17, is condensed onto the object being examined 19 by means of a condenser lens 18, and the reflected light therefrom is imaged on a solid image sensor 21 by means of an imaging lens 20. If there is an abnormal position in the object being examined 19, it is detected by the image sensor 21. Performing subordinate scanning by sending the object being examined 19 by the driving system 24, the rotating speed of the driving system 24 is detected by a position detector 25 to detect the subordinate scanning position of the object being examined, of which signal is applied to a signal controller 27. A photo sensor for synchronization 26 detects the scanning beam from the lens 23 at the principal scanning direction end part. Using the output signal thereof, the controller 27 synchronizes the image signal transfer pulse of the image sensor 21 with the scanning beam. The controller 27 causes the size and location of the abnormal position to be displayed in a display part 28, and the waveform is displayed in a CRT 29.
JP3215278A 1978-03-20 1978-03-20 Laser flaw inspector Pending JPS54124784A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3215278A JPS54124784A (en) 1978-03-20 1978-03-20 Laser flaw inspector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3215278A JPS54124784A (en) 1978-03-20 1978-03-20 Laser flaw inspector

Publications (1)

Publication Number Publication Date
JPS54124784A true JPS54124784A (en) 1979-09-27

Family

ID=12350930

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3215278A Pending JPS54124784A (en) 1978-03-20 1978-03-20 Laser flaw inspector

Country Status (1)

Country Link
JP (1) JPS54124784A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5924202A (en) * 1982-07-30 1984-02-07 Matsushita Electric Works Ltd Surface defect detector
JPS62277540A (en) * 1986-05-27 1987-12-02 Ube Ind Ltd Automatic measuring and inspecting apparatus for contamination in polyethylene
JPH01277812A (en) * 1988-04-30 1989-11-08 Laser Tec Kk Microscopic device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5924202A (en) * 1982-07-30 1984-02-07 Matsushita Electric Works Ltd Surface defect detector
JPS6338083B2 (en) * 1982-07-30 1988-07-28 Matsushita Electric Works Ltd
JPS62277540A (en) * 1986-05-27 1987-12-02 Ube Ind Ltd Automatic measuring and inspecting apparatus for contamination in polyethylene
JPH01277812A (en) * 1988-04-30 1989-11-08 Laser Tec Kk Microscopic device

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