JPS5923492A - 薄膜ｅｌ素子の電極形成方法 - Google Patents

薄膜ｅｌ素子の電極形成方法

Info

Publication number
JPS5923492A
JPS5923492A JP57133929A JP13392982A JPS5923492A JP S5923492 A JPS5923492 A JP S5923492A JP 57133929 A JP57133929 A JP 57133929A JP 13392982 A JP13392982 A JP 13392982A JP S5923492 A JPS5923492 A JP S5923492A
Authority
JP
Japan
Prior art keywords
film
thin film
back electrode
electrode
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57133929A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6248358B2 (cg-RX-API-DMAC7.html
Inventor
佳弘 遠藤
井坂　欽一
川口　順
岸下　博
上出　久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP57133929A priority Critical patent/JPS5923492A/ja
Publication of JPS5923492A publication Critical patent/JPS5923492A/ja
Publication of JPS6248358B2 publication Critical patent/JPS6248358B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
JP57133929A 1982-07-30 1982-07-30 薄膜ｅｌ素子の電極形成方法 Granted JPS5923492A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57133929A JPS5923492A (ja) 1982-07-30 1982-07-30 薄膜ｅｌ素子の電極形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57133929A JPS5923492A (ja) 1982-07-30 1982-07-30 薄膜ｅｌ素子の電極形成方法

Publications (2)

Publication Number Publication Date
JPS5923492A true JPS5923492A (ja) 1984-02-06
JPS6248358B2 JPS6248358B2 (cg-RX-API-DMAC7.html) 1987-10-13

Family

ID=15116373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57133929A Granted JPS5923492A (ja) 1982-07-30 1982-07-30 薄膜ｅｌ素子の電極形成方法

Country Status (1)

Country Link
JP (1) JPS5923492A (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62110987U (cg-RX-API-DMAC7.html) * 1985-12-27 1987-07-15

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62110987U (cg-RX-API-DMAC7.html) * 1985-12-27 1987-07-15

Also Published As

Publication number Publication date
JPS6248358B2 (cg-RX-API-DMAC7.html) 1987-10-13

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