JPS59228729A - 半導体測定装置 - Google Patents

半導体測定装置

Info

Publication number
JPS59228729A
JPS59228729A JP58103341A JP10334183A JPS59228729A JP S59228729 A JPS59228729 A JP S59228729A JP 58103341 A JP58103341 A JP 58103341A JP 10334183 A JP10334183 A JP 10334183A JP S59228729 A JPS59228729 A JP S59228729A
Authority
JP
Japan
Prior art keywords
measuring
measurement
items
tester
program
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58103341A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6321344B2 (enrdf_load_stackoverflow
Inventor
Katsuaki Utena
臺　克明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP58103341A priority Critical patent/JPS59228729A/ja
Publication of JPS59228729A publication Critical patent/JPS59228729A/ja
Publication of JPS6321344B2 publication Critical patent/JPS6321344B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/22—Detection or location of defective computer hardware by testing during standby operation or during idle time, e.g. start-up testing
    • G06F11/2273—Test methods

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP58103341A 1983-06-09 1983-06-09 半導体測定装置 Granted JPS59228729A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58103341A JPS59228729A (ja) 1983-06-09 1983-06-09 半導体測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58103341A JPS59228729A (ja) 1983-06-09 1983-06-09 半導体測定装置

Publications (2)

Publication Number Publication Date
JPS59228729A true JPS59228729A (ja) 1984-12-22
JPS6321344B2 JPS6321344B2 (enrdf_load_stackoverflow) 1988-05-06

Family

ID=14351437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58103341A Granted JPS59228729A (ja) 1983-06-09 1983-06-09 半導体測定装置

Country Status (1)

Country Link
JP (1) JPS59228729A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01197674A (ja) * 1988-02-03 1989-08-09 Mitsubishi Electric Corp 物品検査方法
JPH04143676A (ja) * 1990-10-04 1992-05-18 Nec Corp 電子部品測定システム
JP2009031028A (ja) * 2007-07-25 2009-02-12 Fujitsu Ltd 試験方法及び装置
JP2019152485A (ja) * 2018-03-01 2019-09-12 株式会社東京精密 測定プログラムの管理方法及び管理装置、並びに測定システム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS593371A (ja) * 1982-06-30 1984-01-10 Nec Corp 半導体装置の試験装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS593371A (ja) * 1982-06-30 1984-01-10 Nec Corp 半導体装置の試験装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01197674A (ja) * 1988-02-03 1989-08-09 Mitsubishi Electric Corp 物品検査方法
JPH04143676A (ja) * 1990-10-04 1992-05-18 Nec Corp 電子部品測定システム
JP2009031028A (ja) * 2007-07-25 2009-02-12 Fujitsu Ltd 試験方法及び装置
JP2019152485A (ja) * 2018-03-01 2019-09-12 株式会社東京精密 測定プログラムの管理方法及び管理装置、並びに測定システム

Also Published As

Publication number Publication date
JPS6321344B2 (enrdf_load_stackoverflow) 1988-05-06

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