JPS59217339A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法Info
- Publication number
- JPS59217339A JPS59217339A JP9264283A JP9264283A JPS59217339A JP S59217339 A JPS59217339 A JP S59217339A JP 9264283 A JP9264283 A JP 9264283A JP 9264283 A JP9264283 A JP 9264283A JP S59217339 A JPS59217339 A JP S59217339A
- Authority
- JP
- Japan
- Prior art keywords
- film
- mask material
- mask
- material film
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 8
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 239000000463 material Substances 0.000 claims abstract description 35
- 238000000034 method Methods 0.000 claims abstract description 24
- 238000005530 etching Methods 0.000 claims abstract description 23
- 239000000758 substrate Substances 0.000 claims abstract description 20
- 238000001020 plasma etching Methods 0.000 claims description 21
- 230000015572 biosynthetic process Effects 0.000 claims description 15
- 238000000151 deposition Methods 0.000 claims description 2
- 238000009413 insulation Methods 0.000 abstract 5
- 238000000059 patterning Methods 0.000 abstract 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 18
- 239000007789 gas Substances 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 239000010410 layer Substances 0.000 description 10
- 229920002120 photoresistant polymer Polymers 0.000 description 8
- 229910052681 coesite Inorganic materials 0.000 description 6
- 229910052906 cristobalite Inorganic materials 0.000 description 6
- 229910052682 stishovite Inorganic materials 0.000 description 6
- 229910052905 tridymite Inorganic materials 0.000 description 6
- 238000005468 ion implantation Methods 0.000 description 5
- 238000002955 isolation Methods 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 244000089486 Phragmites australis subsp australis Species 0.000 description 1
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- LDDQLRUQCUTJBB-UHFFFAOYSA-N ammonium fluoride Chemical compound [NH4+].[F-] LDDQLRUQCUTJBB-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
- H01L21/76229—Concurrent filling of a plurality of trenches having a different trench shape or dimension, e.g. rectangular and V-shaped trenches, wide and narrow trenches, shallow and deep trenches
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Drying Of Semiconductors (AREA)
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9264283A JPS59217339A (ja) | 1983-05-26 | 1983-05-26 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9264283A JPS59217339A (ja) | 1983-05-26 | 1983-05-26 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59217339A true JPS59217339A (ja) | 1984-12-07 |
| JPH0562463B2 JPH0562463B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-09-08 |
Family
ID=14060101
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9264283A Granted JPS59217339A (ja) | 1983-05-26 | 1983-05-26 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59217339A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61141171A (ja) * | 1984-12-14 | 1986-06-28 | Toshiba Corp | 半導体装置の製造方法 |
| JPH01276641A (ja) * | 1988-03-24 | 1989-11-07 | Motorola Inc | 半導体デバイスの製造方法 |
| JPH0366145A (ja) * | 1989-07-28 | 1991-03-20 | American Teleph & Telegr Co <Att> | 半導体装置 |
| JPH03148155A (ja) * | 1989-10-25 | 1991-06-24 | Internatl Business Mach Corp <Ibm> | 誘電体充填分離トレンチ形成方法 |
| JPH06177236A (ja) * | 1992-08-31 | 1994-06-24 | Hyundai Electron Ind Co Ltd | トレンチ構造の素子分離膜の製造方法 |
| KR970030214A (ko) * | 1995-11-06 | 1997-06-26 | 김주용 | 웨이퍼 평탄화 방법 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5320873A (en) * | 1976-08-11 | 1978-02-25 | Hitachi Ltd | Semiconductor integrated circuit device |
-
1983
- 1983-05-26 JP JP9264283A patent/JPS59217339A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5320873A (en) * | 1976-08-11 | 1978-02-25 | Hitachi Ltd | Semiconductor integrated circuit device |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61141171A (ja) * | 1984-12-14 | 1986-06-28 | Toshiba Corp | 半導体装置の製造方法 |
| JPH01276641A (ja) * | 1988-03-24 | 1989-11-07 | Motorola Inc | 半導体デバイスの製造方法 |
| JPH0366145A (ja) * | 1989-07-28 | 1991-03-20 | American Teleph & Telegr Co <Att> | 半導体装置 |
| JPH03148155A (ja) * | 1989-10-25 | 1991-06-24 | Internatl Business Mach Corp <Ibm> | 誘電体充填分離トレンチ形成方法 |
| JPH06177236A (ja) * | 1992-08-31 | 1994-06-24 | Hyundai Electron Ind Co Ltd | トレンチ構造の素子分離膜の製造方法 |
| KR970030214A (ko) * | 1995-11-06 | 1997-06-26 | 김주용 | 웨이퍼 평탄화 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0562463B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-09-08 |
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