JPS59181674A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS59181674A
JPS59181674A JP58055841A JP5584183A JPS59181674A JP S59181674 A JPS59181674 A JP S59181674A JP 58055841 A JP58055841 A JP 58055841A JP 5584183 A JP5584183 A JP 5584183A JP S59181674 A JPS59181674 A JP S59181674A
Authority
JP
Japan
Prior art keywords
layer
gallium arsenide
undoped
gaas
semiconductor layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58055841A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0437583B2 (enExample
Inventor
Masahiko Takigawa
正彦 滝川
Kazumi Kasai
和美 河西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP58055841A priority Critical patent/JPS59181674A/ja
Publication of JPS59181674A publication Critical patent/JPS59181674A/ja
Publication of JPH0437583B2 publication Critical patent/JPH0437583B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/80—FETs having rectifying junction gate electrodes

Landscapes

  • Bipolar Transistors (AREA)
  • Junction Field-Effect Transistors (AREA)
JP58055841A 1983-03-31 1983-03-31 半導体装置の製造方法 Granted JPS59181674A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58055841A JPS59181674A (ja) 1983-03-31 1983-03-31 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58055841A JPS59181674A (ja) 1983-03-31 1983-03-31 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS59181674A true JPS59181674A (ja) 1984-10-16
JPH0437583B2 JPH0437583B2 (enExample) 1992-06-19

Family

ID=13010225

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58055841A Granted JPS59181674A (ja) 1983-03-31 1983-03-31 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS59181674A (enExample)

Also Published As

Publication number Publication date
JPH0437583B2 (enExample) 1992-06-19

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