JPS59172225A - 薄膜磁性体の作製法 - Google Patents

薄膜磁性体の作製法

Info

Publication number
JPS59172225A
JPS59172225A JP4630783A JP4630783A JPS59172225A JP S59172225 A JPS59172225 A JP S59172225A JP 4630783 A JP4630783 A JP 4630783A JP 4630783 A JP4630783 A JP 4630783A JP S59172225 A JPS59172225 A JP S59172225A
Authority
JP
Japan
Prior art keywords
magnet
magnetic
target
magnetic material
pole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4630783A
Other languages
English (en)
Japanese (ja)
Other versions
JPH035643B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Sakakima
博 榊間
Akio Kuroe
章郎 黒江
Masaru Higashioji
賢 東陰地
Mitsuo Satomi
三男 里見
Terumasa Sawai
瑛昌 沢井
Kenji Kondo
近藤　健次
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4630783A priority Critical patent/JPS59172225A/ja
Publication of JPS59172225A publication Critical patent/JPS59172225A/ja
Publication of JPH035643B2 publication Critical patent/JPH035643B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Thin Magnetic Films (AREA)
JP4630783A 1983-03-18 1983-03-18 薄膜磁性体の作製法 Granted JPS59172225A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4630783A JPS59172225A (ja) 1983-03-18 1983-03-18 薄膜磁性体の作製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4630783A JPS59172225A (ja) 1983-03-18 1983-03-18 薄膜磁性体の作製法

Publications (2)

Publication Number Publication Date
JPS59172225A true JPS59172225A (ja) 1984-09-28
JPH035643B2 JPH035643B2 (enrdf_load_stackoverflow) 1991-01-28

Family

ID=12743530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4630783A Granted JPS59172225A (ja) 1983-03-18 1983-03-18 薄膜磁性体の作製法

Country Status (1)

Country Link
JP (1) JPS59172225A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5403457A (en) * 1992-08-24 1995-04-04 Matsushita Electric Industrial Co., Ltd. Method for making soft magnetic film
WO1998031041A1 (en) * 1997-01-07 1998-07-16 Gencoa Limited Vapour deposition coating apparatus
CN104465017A (zh) * 2014-12-15 2015-03-25 南京理工大学 一种Nd掺杂CoZr基高频软磁薄膜及其制备

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5358489A (en) * 1976-11-08 1978-05-26 Ise Electronics Corp Spattering system
JPS55107773A (en) * 1979-02-09 1980-08-19 Matsushita Electric Ind Co Ltd Manufacture of amorphous film
JPS5778123A (en) * 1980-11-04 1982-05-15 Hitachi Ltd Manufacture of anisotropic thin magnetic film

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5358489A (en) * 1976-11-08 1978-05-26 Ise Electronics Corp Spattering system
JPS55107773A (en) * 1979-02-09 1980-08-19 Matsushita Electric Ind Co Ltd Manufacture of amorphous film
JPS5778123A (en) * 1980-11-04 1982-05-15 Hitachi Ltd Manufacture of anisotropic thin magnetic film

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5403457A (en) * 1992-08-24 1995-04-04 Matsushita Electric Industrial Co., Ltd. Method for making soft magnetic film
WO1998031041A1 (en) * 1997-01-07 1998-07-16 Gencoa Limited Vapour deposition coating apparatus
US6383565B1 (en) 1997-01-07 2002-05-07 Gencoa Limited Vapor deposition coating apparatus
CN104465017A (zh) * 2014-12-15 2015-03-25 南京理工大学 一种Nd掺杂CoZr基高频软磁薄膜及其制备

Also Published As

Publication number Publication date
JPH035643B2 (enrdf_load_stackoverflow) 1991-01-28

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