JPS6367328B2 - - Google Patents

Info

Publication number
JPS6367328B2
JPS6367328B2 JP55108195A JP10819580A JPS6367328B2 JP S6367328 B2 JPS6367328 B2 JP S6367328B2 JP 55108195 A JP55108195 A JP 55108195A JP 10819580 A JP10819580 A JP 10819580A JP S6367328 B2 JPS6367328 B2 JP S6367328B2
Authority
JP
Japan
Prior art keywords
target
substrate
film
bias voltage
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55108195A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5734324A (en
Inventor
Takashi Tomie
Sadao Kadokura
Kazuhiko Pponjo
Shigenobu Sobajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teijin Ltd
Original Assignee
Teijin Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teijin Ltd filed Critical Teijin Ltd
Priority to JP10819580A priority Critical patent/JPS5734324A/ja
Publication of JPS5734324A publication Critical patent/JPS5734324A/ja
Publication of JPS6367328B2 publication Critical patent/JPS6367328B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
JP10819580A 1980-08-08 1980-08-08 Manufacture of vertically magnetized film Granted JPS5734324A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10819580A JPS5734324A (en) 1980-08-08 1980-08-08 Manufacture of vertically magnetized film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10819580A JPS5734324A (en) 1980-08-08 1980-08-08 Manufacture of vertically magnetized film

Publications (2)

Publication Number Publication Date
JPS5734324A JPS5734324A (en) 1982-02-24
JPS6367328B2 true JPS6367328B2 (enrdf_load_stackoverflow) 1988-12-26

Family

ID=14478413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10819580A Granted JPS5734324A (en) 1980-08-08 1980-08-08 Manufacture of vertically magnetized film

Country Status (1)

Country Link
JP (1) JPS5734324A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5968825A (ja) * 1982-10-14 1984-04-18 Teijin Ltd 磁気記録媒体の製造法
JPS62266731A (ja) * 1986-05-15 1987-11-19 Tohoku Metal Ind Ltd 垂直磁気記録媒体の製造装置
JPS6326827A (ja) * 1986-07-21 1988-02-04 Hitachi Ltd 磁気記録媒体の製造方法
JPH02289923A (ja) * 1990-04-20 1990-11-29 Seiko Epson Corp 磁気記録媒体製造方法
JPH05274644A (ja) * 1992-01-29 1993-10-22 Mitsubishi Kasei Corp 磁気記録媒体及びその製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5891B2 (ja) * 1977-09-30 1983-01-05 俊一 岩崎 磁気記録媒体
JPS5512732A (en) * 1978-07-14 1980-01-29 Anelva Corp Sputtering apparatus for making thin magnetic film

Also Published As

Publication number Publication date
JPS5734324A (en) 1982-02-24

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