JPS5358489A - Spattering system - Google Patents

Spattering system

Info

Publication number
JPS5358489A
JPS5358489A JP13434376A JP13434376A JPS5358489A JP S5358489 A JPS5358489 A JP S5358489A JP 13434376 A JP13434376 A JP 13434376A JP 13434376 A JP13434376 A JP 13434376A JP S5358489 A JPS5358489 A JP S5358489A
Authority
JP
Japan
Prior art keywords
spattering
spattering system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13434376A
Other languages
Japanese (ja)
Inventor
Mitsuaki Morikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Noritake Itron Corp
Original Assignee
Ise Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ise Electronics Corp filed Critical Ise Electronics Corp
Priority to JP13434376A priority Critical patent/JPS5358489A/en
Publication of JPS5358489A publication Critical patent/JPS5358489A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP13434376A 1976-11-08 1976-11-08 Spattering system Pending JPS5358489A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13434376A JPS5358489A (en) 1976-11-08 1976-11-08 Spattering system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13434376A JPS5358489A (en) 1976-11-08 1976-11-08 Spattering system

Publications (1)

Publication Number Publication Date
JPS5358489A true JPS5358489A (en) 1978-05-26

Family

ID=15126125

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13434376A Pending JPS5358489A (en) 1976-11-08 1976-11-08 Spattering system

Country Status (1)

Country Link
JP (1) JPS5358489A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58500174A (en) * 1981-02-12 1983-02-03 ザ・ビーオーシー・グループ・パブリック・リミテッド・カンパニー Magnetron type cathode sputtering equipment
US4407713A (en) * 1980-08-08 1983-10-04 Battelle Development Corporation Cylindrical magnetron sputtering cathode and apparatus
JPS59172225A (en) * 1983-03-18 1984-09-28 Matsushita Electric Ind Co Ltd Manufacture of thin film magnetic material
US4525264A (en) * 1981-12-07 1985-06-25 Ford Motor Company Cylindrical post magnetron sputtering system
US5409590A (en) * 1989-04-17 1995-04-25 Materials Research Corporation Target cooling and support for magnetron sputter coating apparatus

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4407713A (en) * 1980-08-08 1983-10-04 Battelle Development Corporation Cylindrical magnetron sputtering cathode and apparatus
JPS58500174A (en) * 1981-02-12 1983-02-03 ザ・ビーオーシー・グループ・パブリック・リミテッド・カンパニー Magnetron type cathode sputtering equipment
JPH0368113B2 (en) * 1981-02-12 1991-10-25 Shataapuruufu Gurasu Corp
US4525264A (en) * 1981-12-07 1985-06-25 Ford Motor Company Cylindrical post magnetron sputtering system
JPS59172225A (en) * 1983-03-18 1984-09-28 Matsushita Electric Ind Co Ltd Manufacture of thin film magnetic material
JPH035643B2 (en) * 1983-03-18 1991-01-28 Matsushita Electric Ind Co Ltd
US5409590A (en) * 1989-04-17 1995-04-25 Materials Research Corporation Target cooling and support for magnetron sputter coating apparatus

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