JPS5358489A - Spattering system - Google Patents
Spattering systemInfo
- Publication number
- JPS5358489A JPS5358489A JP13434376A JP13434376A JPS5358489A JP S5358489 A JPS5358489 A JP S5358489A JP 13434376 A JP13434376 A JP 13434376A JP 13434376 A JP13434376 A JP 13434376A JP S5358489 A JPS5358489 A JP S5358489A
- Authority
- JP
- Japan
- Prior art keywords
- spattering
- spattering system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13434376A JPS5358489A (en) | 1976-11-08 | 1976-11-08 | Spattering system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13434376A JPS5358489A (en) | 1976-11-08 | 1976-11-08 | Spattering system |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5358489A true JPS5358489A (en) | 1978-05-26 |
Family
ID=15126125
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13434376A Pending JPS5358489A (en) | 1976-11-08 | 1976-11-08 | Spattering system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5358489A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58500174A (en) * | 1981-02-12 | 1983-02-03 | ザ・ビーオーシー・グループ・パブリック・リミテッド・カンパニー | Magnetron type cathode sputtering equipment |
US4407713A (en) * | 1980-08-08 | 1983-10-04 | Battelle Development Corporation | Cylindrical magnetron sputtering cathode and apparatus |
JPS59172225A (en) * | 1983-03-18 | 1984-09-28 | Matsushita Electric Ind Co Ltd | Manufacture of thin film magnetic material |
US4525264A (en) * | 1981-12-07 | 1985-06-25 | Ford Motor Company | Cylindrical post magnetron sputtering system |
US5409590A (en) * | 1989-04-17 | 1995-04-25 | Materials Research Corporation | Target cooling and support for magnetron sputter coating apparatus |
-
1976
- 1976-11-08 JP JP13434376A patent/JPS5358489A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4407713A (en) * | 1980-08-08 | 1983-10-04 | Battelle Development Corporation | Cylindrical magnetron sputtering cathode and apparatus |
JPS58500174A (en) * | 1981-02-12 | 1983-02-03 | ザ・ビーオーシー・グループ・パブリック・リミテッド・カンパニー | Magnetron type cathode sputtering equipment |
JPH0368113B2 (en) * | 1981-02-12 | 1991-10-25 | Shataapuruufu Gurasu Corp | |
US4525264A (en) * | 1981-12-07 | 1985-06-25 | Ford Motor Company | Cylindrical post magnetron sputtering system |
JPS59172225A (en) * | 1983-03-18 | 1984-09-28 | Matsushita Electric Ind Co Ltd | Manufacture of thin film magnetic material |
JPH035643B2 (en) * | 1983-03-18 | 1991-01-28 | Matsushita Electric Ind Co Ltd | |
US5409590A (en) * | 1989-04-17 | 1995-04-25 | Materials Research Corporation | Target cooling and support for magnetron sputter coating apparatus |
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