JPH035643B2 - - Google Patents

Info

Publication number
JPH035643B2
JPH035643B2 JP58046307A JP4630783A JPH035643B2 JP H035643 B2 JPH035643 B2 JP H035643B2 JP 58046307 A JP58046307 A JP 58046307A JP 4630783 A JP4630783 A JP 4630783A JP H035643 B2 JPH035643 B2 JP H035643B2
Authority
JP
Japan
Prior art keywords
target
magnet
magnetic
substrate
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58046307A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59172225A (ja
Inventor
Hiroshi Sakakima
Akio Kuroe
Masaru Higashioji
Mitsuo Satomi
Terumasa Sawai
Kenji Kondo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4630783A priority Critical patent/JPS59172225A/ja
Publication of JPS59172225A publication Critical patent/JPS59172225A/ja
Publication of JPH035643B2 publication Critical patent/JPH035643B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Thin Magnetic Films (AREA)
JP4630783A 1983-03-18 1983-03-18 薄膜磁性体の作製法 Granted JPS59172225A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4630783A JPS59172225A (ja) 1983-03-18 1983-03-18 薄膜磁性体の作製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4630783A JPS59172225A (ja) 1983-03-18 1983-03-18 薄膜磁性体の作製法

Publications (2)

Publication Number Publication Date
JPS59172225A JPS59172225A (ja) 1984-09-28
JPH035643B2 true JPH035643B2 (enrdf_load_stackoverflow) 1991-01-28

Family

ID=12743530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4630783A Granted JPS59172225A (ja) 1983-03-18 1983-03-18 薄膜磁性体の作製法

Country Status (1)

Country Link
JP (1) JPS59172225A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5403457A (en) * 1992-08-24 1995-04-04 Matsushita Electric Industrial Co., Ltd. Method for making soft magnetic film
GB9700158D0 (en) 1997-01-07 1997-02-26 Gencoa Limited Versatile coating deposition system
CN104465017A (zh) * 2014-12-15 2015-03-25 南京理工大学 一种Nd掺杂CoZr基高频软磁薄膜及其制备

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5358489A (en) * 1976-11-08 1978-05-26 Ise Electronics Corp Spattering system
JPS55107773A (en) * 1979-02-09 1980-08-19 Matsushita Electric Ind Co Ltd Manufacture of amorphous film
JPS5778123A (en) * 1980-11-04 1982-05-15 Hitachi Ltd Manufacture of anisotropic thin magnetic film

Also Published As

Publication number Publication date
JPS59172225A (ja) 1984-09-28

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