JPS5914679A - 光起電力装置 - Google Patents

光起電力装置

Info

Publication number
JPS5914679A
JPS5914679A JP57122940A JP12294082A JPS5914679A JP S5914679 A JPS5914679 A JP S5914679A JP 57122940 A JP57122940 A JP 57122940A JP 12294082 A JP12294082 A JP 12294082A JP S5914679 A JPS5914679 A JP S5914679A
Authority
JP
Japan
Prior art keywords
layer
thickness
type
incident light
amorphous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57122940A
Other languages
English (en)
Inventor
Hidetoshi Nozaki
野崎　秀俊
Tamotsu Hatayama
畑山　保
Takaaki Kamimura
孝明 上村
Tadashi Utagawa
忠 歌川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP57122940A priority Critical patent/JPS5914679A/ja
Priority to EP83304053A priority patent/EP0099720B1/en
Priority to DE8383304053T priority patent/DE3376714D1/de
Priority to US06/513,390 priority patent/US4500744A/en
Publication of JPS5914679A publication Critical patent/JPS5914679A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/075—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PIN type, e.g. amorphous silicon PIN solar cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
    • H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
    • H01L31/03921—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate including only elements of Group IV of the Periodic Table
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
    • H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
    • H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
    • H01L31/105—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PIN type
    • H01L31/1055—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PIN type the devices comprising amorphous materials of Group IV of the Periodic Table
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/548—Amorphous silicon PV cells

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Photovoltaic Devices (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【発明の詳細な説明】 〔発明の属する技術分野〕 本発明は太陽電池や光検出器等の光起電力装置に関する
。
〔従来技術とその問題点〕
最近、半導体材料にアモルファスシリコｙ（３−８ｉ）
を用いて、安価かつ大量に太陽１池ｔ−製造する方法が
提案された。
ａ　−Ｓ　ｉは、７ランやフロル７ラン等のグロー放１
４１汁解によって形成され、禁止帯幅中の平均局在準位
密度も１０１７メ３以下と小さい。
第１図にａ−８ｉを用いたＰｉｎ型の太陽電池のバンド
図を示す。１１〜１３は夫々ＰＪ偕、ｉ層、ｎ層を示し
、１４はフェルミ準位、１５〜１７Ｆｉ光学的禁止帯幅
（Ｅｇ　）、１８はＰｉ接合の拡故砥位である。
今、Ｐ層側から光が入射するとｉ層側の空全層中Ｋｍ子
、正孔対が発生し、拡散電位によって分離、移動して対
向電極に・捕集され起重力が生じる。
Ｐ層側は、厚くするに従いＰｉ接合の拡散電位が増し開
放電圧Ｖｏｃ　、短絡電流Ｔｓｃが向上するが、余り厚
いとＰ層でのキャリアの再結合やｉ層に達する光量が減
少する為、Ｊｓｃが低下する。従って通常２００Ａ以下
で用いられる。ｉ層では、電子、正孔対が発生するが、
拡散載位領域幅に少数キャリアの拡散長を加えた程度の
値で設計され、約５０００　Ａ程度である。
ところで、上記の様に光シ流を発生させる領域は主にｉ
層に存在する為、Ｐ層側での吸収を減少させることが重
要である。この目的の為にＰ層のＥｇ　’（（広げる事
が考えられる。
実際、グロー放嶋条件を制御すれば、ａｇをＰ　１ｍで
ｉ、８ｅＶ以上、ｎ層で１．９　ｅＶ以上にできる。し
かし、この様な層をそのまま用いると、その膜厚を２０
０〜３００八以上にしないと充分な開放電圧が得られな
い。これは、アモルファスシリコンの活性化エネルギー
が増加し、拡散電位が低下するからであると考えられる
。第２図の曲線ａはＢ２Ｈ６／ＳｉＨ，が１．０チの場
合、ｂは０．０５％とすることによってＥｇ（ｉ７大き
くした場合の特性を示し、Ｐ層側の膜厚を大としなけれ
ば充分なＶｏｃが得られない事が判る。又、Ｅｇｔ：小
として膜厚を薄くすることも考えられるが、その結果ｐ
ｉ接合が不充分に形成される為、曲線因子ＦＦが悪くな
るので好ましくない、。
〔発明の目的〕
従って、本発明は、高い開放電圧Ｖｏｃと、大きな生成
電流を得る事を目的とする。
〔発明の概要〕
本発明は、入射光側にあるＰ又はｎ型のアモルファス７
リコン層の光学的禁止帯幅が内部に向って大となる様に
構成したものである。
〔発明の効果〕
本発明に従い、例えば入射光側層のｌＥｇｉｌ、７ｅＶ
以下とし、２０〜５０ＡのＰ層を形成すれば、５０〜１
００　ＡのＥｇ　＞　１．８　ｅＶＯＰ層を追加するだ
けで充分な開放電圧Ｖｏｃが得られる。又、全体の厚み
が減少し、平均ｌａｇも減少するので光の透過率も増大
し、短絡電流＠度Ｊｓｃも向上させることができる。
〔発明の実施例〕
第３図は、本発明の実施例の断面図でおる。先ず、ガラ
ス基板２１上に６００〜８００ＸのＩＴＯ膜層が設けら
れ、Ｅｇ　”　１．６　ｅＶ、膜厚２０ＡのＰ型ａ−Ｓ
ｉ層２３＋　ｓ　Ｐｒｇ　＝　１．８　ｅＶ、膜厚ｔｏ
ｏＸのＰ型ａ−Ｓｉ層２３２．５０００Ｘの１層２４．
５００Ｘのｎ型のａ−Ｓｉ層２５が被着され、更にアル
ミニウムからなるオ県捗り電極２６が被着されている。
Ｅｇ　：　１　、６　ｅＶ　ｖＣするには、例えば１７
醋シ／礪２１、ＯＴｏｒｒ　、線流ｔ　１００８ＣＣＭ
とし、基板温度′ｒＳ＞　２５０００、Ｂ２Ｈ，／Ｓｉ
Ｈ，）”　−ヒンｆ　比１％以上、！ニーｊれば良い。
同様に１．ｓｅＶ以上にするにはＴＳ５２２０’Ｏｓ　
Ｂ２１１ｅ　／　ＳＳ　Ｈ４を０．５％以下とすれば良
い。ドーピング比が高い程、又Ｔｓが高い程Ｅｇは小さ
くなる。
第４図は、そのバンド図を示している。この様な構成に
することによｐ１短絡゛電流Ｊｓｃが大幅に改善され、
開放電圧Ｖｏｃも減少しないので、変換効率も向上した
。
下表は、上記実施例（Ａ）、Ｐ層が単層でＥｇ　＝１．
６ｅＶの場合ＣＢ）、Ｐ層が単層でＥｇ　”−１，８ｅ
Ｖの場合（０）の短絡電流密度Ｊｓｃ　１変換効率ダを
゛比較したものである。３者とも、開放電圧Ｖｏｃ　＝
　０．８ＶとなるようＶＣＰ層膜厚を調整した。
第５図はＩ−Ｖ％性を示し、曲線ａＩ２本実施例の場合
、曲線すはＥｇ”１．８ｅＶ、膜厚１８０ＡのＰ層を用
いた場合を示す。
淘、上記実施例では、ｇｇ　＝＝　・１．６ｅＶ、　２
０ＡのＰ型ａ−８ｉ　７４２３１　、　’Ｍｇ　＝　１
．８ｅＶ、　１００ＡのＰｉＪ、ａ−Ｓｉ層２３２の場
合について述べたが、他の実施例としてＥｇ　＝　１．
６ｅＶ、　２０ＡのＰ型ａ−Ｓｉ層２３ＩＩＥｇ＝１．
９ｅＶ、　１００〜１３０ＡのＰ型ａ−８ｉ層２３２ノ
場合でも同様な効果がある。
又、以上の実施例では入射光側にＰ層が存在する場合に
ついて述べたが、ｎ層であっても良い。
この場合は初段ｔｌ、８ｅＶ以下、次段以降ｅ１．９ｅ
Ｖ以上とすれば良い。又、ドーピング比、Ｔｓｉ制御す
る場合について述べたが、ガス圧力や流量を制御しても
同等の効果が得られる。この場合、圧力が縞い程、又シ
ラン流量が多い程Ｅｇが小さくなる傾向がある。又、Ｔ
ｓの制御も赤外線ランプの照射によって行えば制御良く
行える。その他、この見本発明はこれら金含むものであ
る事は勿論である。
【図面の簡単な説明】
第１図は従来例を説明するバンド図、第２図は２層膜厚
に対する開放電圧Ｖｏｃの特性図、第３図は本発明の実
施例の断面図、第４図はそのバンド図、第５図はＩ−Ｖ
特性図である。 図において、 ２１・・・ガラス基板、２２・・・ＩＴＯ膜、２３．　
、２３．・・・Ｐ型ａ−８ｉ層、２４−・ｉ層、２５−
・・ｎ型ａ　−Ｓ　ｉ層、２６・・・アルミニウム電極
、１５８．１５２・・・光学的禁止帯幅。

Claims (1)

    【特許請求の範囲】
  1. 基板上にＰｉｎ構造の７モ少７アス７リコ／層を設け、
    その表面にオーミック電極を設けた光起電力装置におい
    て、入射光側のＰ又はｎ型アモルファスシリコン層の光
    学的禁止帯幅が丙部“に向って大となるようにした事ｆ
    ：特徴とする光起電力装置。
JP57122940A 1982-07-16 1982-07-16 光起電力装置 Pending JPS5914679A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP57122940A JPS5914679A (ja) 1982-07-16 1982-07-16 光起電力装置
EP83304053A EP0099720B1 (en) 1982-07-16 1983-07-12 Photovoltaic device
DE8383304053T DE3376714D1 (en) 1982-07-16 1983-07-12 Photovoltaic device
US06/513,390 US4500744A (en) 1982-07-16 1983-07-13 Photovoltaic device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57122940A JPS5914679A (ja) 1982-07-16 1982-07-16 光起電力装置

Publications (1)

Publication Number Publication Date
JPS5914679A true JPS5914679A (ja) 1984-01-25

Family

ID=14848370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57122940A Pending JPS5914679A (ja) 1982-07-16 1982-07-16 光起電力装置

Country Status (4)

Country Link
US (1) US4500744A (ja)
EP (1) EP0099720B1 (ja)
JP (1) JPS5914679A (ja)
DE (1) DE3376714D1 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60239068A (ja) * 1984-05-11 1985-11-27 Sanyo Electric Co Ltd 光起電力装置
JPS61222278A (ja) * 1985-03-28 1986-10-02 Sanyo Electric Co Ltd 光起電力装置
JPS62115785A (ja) * 1985-11-14 1987-05-27 Kanegafuchi Chem Ind Co Ltd 半導体装置
US4936107A (en) * 1987-11-13 1990-06-26 Kabushiki Kaisha Toshiba External heat exchange unit with plurality of heat exchanger elements and fan devices and method for controlling fan devices
JPH04297648A (ja) * 1991-03-27 1992-10-21 Kyokuto Kogyo Kk 建築設備の吊設支持構造

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1321660C (en) * 1985-11-05 1993-08-24 Hideo Yamagishi Amorphous-containing semiconductor device with high resistivity interlayer or with highly doped interlayer
US4718947A (en) * 1986-04-17 1988-01-12 Solarex Corporation Superlattice doped layers for amorphous silicon photovoltaic cells
JPS6384075A (ja) * 1986-09-26 1988-04-14 Sanyo Electric Co Ltd 光起電力装置
JPH0752778B2 (ja) * 1987-09-14 1995-06-05 三洋電機株式会社 光起電力装置
US5117114A (en) * 1989-12-11 1992-05-26 The Regents Of The University Of California High resolution amorphous silicon radiation detectors
US5055141A (en) * 1990-01-19 1991-10-08 Solarex Corporation Enhancement of short-circuit current by use of wide bandgap n-layers in p-i-n amorphous silicon photovoltaic cells
EP0886325A1 (en) * 1997-06-18 1998-12-23 Rijksuniversiteit Utrecht Amorphous silicon photovoltaic devices and method of making thereof
US6383898B1 (en) * 1999-05-28 2002-05-07 Sharp Kabushiki Kaisha Method for manufacturing photoelectric conversion device
US7667133B2 (en) * 2003-10-29 2010-02-23 The University Of Toledo Hybrid window layer for photovoltaic cells
DE102008014260A1 (de) * 2008-03-13 2009-09-24 Schott Solar Gmbh Silizium-Solarzelle
US20110155229A1 (en) * 2009-12-30 2011-06-30 Du Pont Apollo Ltd. Solar cell and method for manufacturing the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56150876A (en) * 1980-04-24 1981-11-21 Sanyo Electric Co Ltd Photovoltaic device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5688377A (en) * 1979-12-19 1981-07-17 Mitsubishi Electric Corp Solar battery and manufacture thereof
NL8104140A (nl) * 1980-09-09 1982-04-01 Energy Conversion Devices Inc Werkwijze voor het vervaardigen van amorfe halfgeleiderinrichtingen met verbeterde fotogevoelige eigenschappen alsmede als zodanig verkregen inrichtingen.

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56150876A (en) * 1980-04-24 1981-11-21 Sanyo Electric Co Ltd Photovoltaic device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60239068A (ja) * 1984-05-11 1985-11-27 Sanyo Electric Co Ltd 光起電力装置
JPS61222278A (ja) * 1985-03-28 1986-10-02 Sanyo Electric Co Ltd 光起電力装置
JPS62115785A (ja) * 1985-11-14 1987-05-27 Kanegafuchi Chem Ind Co Ltd 半導体装置
US4936107A (en) * 1987-11-13 1990-06-26 Kabushiki Kaisha Toshiba External heat exchange unit with plurality of heat exchanger elements and fan devices and method for controlling fan devices
JPH04297648A (ja) * 1991-03-27 1992-10-21 Kyokuto Kogyo Kk 建築設備の吊設支持構造

Also Published As

Publication number Publication date
EP0099720A3 (en) 1985-05-15
EP0099720A2 (en) 1984-02-01
EP0099720B1 (en) 1988-05-18
DE3376714D1 (en) 1988-06-23
US4500744A (en) 1985-02-19

Similar Documents

Publication Publication Date Title
US4496788A (en) Photovoltaic device
KR960015529B1 (ko) 공간적으로 변조된 진성층을 포함하는 박막 솔라 셀
EP0523919B1 (en) Multijunction photovoltaic device and fabrication method
JP2999280B2 (ja) 光起電力素子
JPS5914679A (ja) 光起電力装置
US6743974B2 (en) Silicon solar cell with germanium backside solar cell
US20050092357A1 (en) Hybrid window layer for photovoltaic cells
US20100132774A1 (en) Thin Film Silicon Solar Cell Device With Amorphous Window Layer
JPS6249672A (ja) アモルフアス光起電力素子
JPS6091679A (ja) 光電装置
JPH06104464A (ja) ｐｉｎアモルファスシリコン光電池に於ける広帯域ギャップｎ層を使用した短絡電流の強化
JP5283588B2 (ja) 太陽電池
US4857115A (en) Photovoltaic device
US6028264A (en) Semiconductor having low concentration of carbon
JP2918814B2 (ja) 光起電力素子及びその製造方法
JP2632740B2 (ja) 非晶質半導体太陽電池
JP2918815B2 (ja) 光起電力素子及びその製造方法
JP3414814B2 (ja) 太陽電池とその製造方法
JP2918813B2 (ja) 光起電力素子及びその製造方法
JP2922796B2 (ja) 太陽電池及びその製造方法
JPS62165374A (ja) アモルフアス光起電力素子
JP4253966B2 (ja) 非晶質薄膜太陽電池
JP3088252B2 (ja) 非晶質太陽電池
JP2958255B2 (ja) 光起電力素子及びその製造方法
JP2937815B2 (ja) 光起電力素子及びその製造方法