JPS59129636A - ６自由度を有するステ−ジの制御装置 - Google Patents

６自由度を有するステ−ジの制御装置

Info

Publication number
JPS59129636A
JPS59129636A JP113383A JP113383A JPS59129636A JP S59129636 A JPS59129636 A JP S59129636A JP 113383 A JP113383 A JP 113383A JP 113383 A JP113383 A JP 113383A JP S59129636 A JPS59129636 A JP S59129636A
Authority
JP
Japan
Prior art keywords
stage
wafer
sets
feed
freedom
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP113383A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0134746B2 (enrdf_load_stackoverflow
Inventor
Naoto Nakajima
直人 中島
Minoru Ikeda
稔 池田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP113383A priority Critical patent/JPS59129636A/ja
Publication of JPS59129636A publication Critical patent/JPS59129636A/ja
Publication of JPH0134746B2 publication Critical patent/JPH0134746B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/18—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for positioning only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/50—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism
    • B23Q1/54—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only
    • B23Q1/545—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only comprising spherical surfaces
    • B23Q1/5462—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only comprising spherical surfaces with one supplementary sliding pair

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Jigs For Machine Tools (AREA)
JP113383A 1983-01-10 1983-01-10 ６自由度を有するステ−ジの制御装置 Granted JPS59129636A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP113383A JPS59129636A (ja) 1983-01-10 1983-01-10 ６自由度を有するステ−ジの制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP113383A JPS59129636A (ja) 1983-01-10 1983-01-10 ６自由度を有するステ−ジの制御装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP63320646A Division JPH029550A (ja) 1988-12-21 1988-12-21 ６自由度微動ステージの駆動装置

Publications (2)

Publication Number Publication Date
JPS59129636A true JPS59129636A (ja) 1984-07-26
JPH0134746B2 JPH0134746B2 (enrdf_load_stackoverflow) 1989-07-20

Family

ID=11492940

Family Applications (1)

Application Number Title Priority Date Filing Date
JP113383A Granted JPS59129636A (ja) 1983-01-10 1983-01-10 ６自由度を有するステ−ジの制御装置

Country Status (1)

Country Link
JP (1) JPS59129636A (enrdf_load_stackoverflow)

Cited By (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6299038A (ja) * 1985-10-25 1987-05-08 Hitachi Ltd 位置決めステ−ジ
JPS62288311A (ja) * 1986-06-05 1987-12-15 Isuzu Motors Ltd ペントル−フ形直噴式内燃機関
JPS6335991U (enrdf_load_stackoverflow) * 1986-08-25 1988-03-08
JPS63193089A (ja) * 1987-02-06 1988-08-10 株式会社日立製作所 ６自由度微動装置
FR2614225A1 (fr) * 1987-04-27 1988-10-28 Framatome Sa Dispositif de reglage de la position de travail d'une machine d'usinage d'un chanfrein et utilisation de ce dispositif.
JPS63166977U (enrdf_load_stackoverflow) * 1987-04-18 1988-10-31
JPS6471640A (en) * 1987-09-14 1989-03-16 Matsushita Electric Ind Co Ltd One-stage six-degree of freedom accurate positioning table
JPH01250891A (ja) * 1988-03-31 1989-10-05 Toshiba Corp 平面位置決め装置
JPH02139146A (ja) * 1988-11-15 1990-05-29 Matsushita Electric Ind Co Ltd 一段６自由度位置決めテーブル
WO1991006396A3 (en) * 1989-10-24 1991-07-25 Lk Ltd Determination of spacial relationships
JPH03224006A (ja) * 1990-01-30 1991-10-03 Matsushita Electric Ind Co Ltd 数値制御装置
JPH03110399U (enrdf_load_stackoverflow) * 1990-02-28 1991-11-12
JPH05506959A (ja) * 1990-10-22 1993-10-07 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン デユアル・モードｚステージ
JPH09317767A (ja) * 1996-05-28 1997-12-09 Nippon Seiko Kk 位置決め装置
JP2000271825A (ja) * 1999-03-25 2000-10-03 Hirata Corp 物品搬送組立装置及び物品搬送組立方法
JP2003062733A (ja) * 2001-08-27 2003-03-05 Sumitomo Heavy Ind Ltd ステージ装置
JP2006210659A (ja) * 2005-01-28 2006-08-10 Psc Kk 気体制御回転移動装置及び気体制御アクチュエータ
JP2006309654A (ja) * 2005-05-02 2006-11-09 Psc Kk 気体制御回転移動装置及び気体制御アクチュエータ
JP2006334728A (ja) * 2005-06-02 2006-12-14 Yaskawa Electric Corp 基板吸着装置と基板支持体および基板搬送装置
JP2007054953A (ja) * 2006-11-21 2007-03-08 Nsk Ltd 位置決め装置
EP0908719B1 (en) * 1997-10-07 2007-05-30 Hitachi Construction Machinery Co., Ltd. Stage unit used for sample positioning and scanning probe microscope with such a stage unit
CN108127452A (zh) * 2017-12-04 2018-06-08 广东开放大学（广东理工职业学院） 一种用于斜面零件加工的夹具
JP2018115904A (ja) * 2017-01-17 2018-07-26 株式会社エヌエステイー レゾルバの特性測定方法及び測定装置
JPWO2019049233A1 (ja) * 2017-09-06 2020-08-20 ホリゾン・インターナショナル株式会社 断裁機
JP2020126126A (ja) * 2019-02-04 2020-08-20 キヤノン株式会社 ステージ装置及び微小操作機器

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0466895A (ja) * 1990-07-06 1992-03-03 Sumitomo Heavy Ind Ltd ６自由度微動ステージ
JP2005028202A (ja) * 2003-07-07 2005-02-03 Hitachi Industries Co Ltd テーブル平行度調整装置とそれを用いたディスペンサ

Cited By (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6299038A (ja) * 1985-10-25 1987-05-08 Hitachi Ltd 位置決めステ−ジ
JPS62288311A (ja) * 1986-06-05 1987-12-15 Isuzu Motors Ltd ペントル−フ形直噴式内燃機関
JPS6335991U (enrdf_load_stackoverflow) * 1986-08-25 1988-03-08
JPS63193089A (ja) * 1987-02-06 1988-08-10 株式会社日立製作所 ６自由度微動装置
JPS63166977U (enrdf_load_stackoverflow) * 1987-04-18 1988-10-31
EP0289389A1 (fr) * 1987-04-27 1988-11-02 Framatome Dispositif de réglage de la position de travail d'une machine d'usinage d'un chanfrein et utilisation de ce dispositif
FR2614225A1 (fr) * 1987-04-27 1988-10-28 Framatome Sa Dispositif de reglage de la position de travail d'une machine d'usinage d'un chanfrein et utilisation de ce dispositif.
US4824301A (en) * 1987-04-27 1989-04-25 Framatome Device for adjusting the working position of a machine for producing a chamfer
JPS6471640A (en) * 1987-09-14 1989-03-16 Matsushita Electric Ind Co Ltd One-stage six-degree of freedom accurate positioning table
JPH01250891A (ja) * 1988-03-31 1989-10-05 Toshiba Corp 平面位置決め装置
JPH02139146A (ja) * 1988-11-15 1990-05-29 Matsushita Electric Ind Co Ltd 一段６自由度位置決めテーブル
WO1991006396A3 (en) * 1989-10-24 1991-07-25 Lk Ltd Determination of spacial relationships
JPH03224006A (ja) * 1990-01-30 1991-10-03 Matsushita Electric Ind Co Ltd 数値制御装置
JPH03110399U (enrdf_load_stackoverflow) * 1990-02-28 1991-11-12
JPH05506959A (ja) * 1990-10-22 1993-10-07 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン デユアル・モードｚステージ
JPH09317767A (ja) * 1996-05-28 1997-12-09 Nippon Seiko Kk 位置決め装置
EP0908719B1 (en) * 1997-10-07 2007-05-30 Hitachi Construction Machinery Co., Ltd. Stage unit used for sample positioning and scanning probe microscope with such a stage unit
JP2000271825A (ja) * 1999-03-25 2000-10-03 Hirata Corp 物品搬送組立装置及び物品搬送組立方法
JP2003062733A (ja) * 2001-08-27 2003-03-05 Sumitomo Heavy Ind Ltd ステージ装置
JP2006210659A (ja) * 2005-01-28 2006-08-10 Psc Kk 気体制御回転移動装置及び気体制御アクチュエータ
JP2006309654A (ja) * 2005-05-02 2006-11-09 Psc Kk 気体制御回転移動装置及び気体制御アクチュエータ
JP2006334728A (ja) * 2005-06-02 2006-12-14 Yaskawa Electric Corp 基板吸着装置と基板支持体および基板搬送装置
JP2007054953A (ja) * 2006-11-21 2007-03-08 Nsk Ltd 位置決め装置
JP2018115904A (ja) * 2017-01-17 2018-07-26 株式会社エヌエステイー レゾルバの特性測定方法及び測定装置
JPWO2019049233A1 (ja) * 2017-09-06 2020-08-20 ホリゾン・インターナショナル株式会社 断裁機
CN108127452A (zh) * 2017-12-04 2018-06-08 广东开放大学（广东理工职业学院） 一种用于斜面零件加工的夹具
CN108127452B (zh) * 2017-12-04 2023-12-12 广东开放大学（广东理工职业学院） 一种用于斜面零件加工的夹具
JP2020126126A (ja) * 2019-02-04 2020-08-20 キヤノン株式会社 ステージ装置及び微小操作機器

Also Published As

Publication number Publication date
JPH0134746B2 (enrdf_load_stackoverflow) 1989-07-20

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