JPS6335991U - - Google Patents

Info

Publication number
JPS6335991U
JPS6335991U JP12908086U JP12908086U JPS6335991U JP S6335991 U JPS6335991 U JP S6335991U JP 12908086 U JP12908086 U JP 12908086U JP 12908086 U JP12908086 U JP 12908086U JP S6335991 U JPS6335991 U JP S6335991U
Authority
JP
Japan
Prior art keywords
holder
treated
utility
rotational position
drive mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12908086U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0616364Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986129080U priority Critical patent/JPH0616364Y2/ja
Publication of JPS6335991U publication Critical patent/JPS6335991U/ja
Application granted granted Critical
Publication of JPH0616364Y2 publication Critical patent/JPH0616364Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP1986129080U 1986-08-25 1986-08-25 高精度移動ステ−ジ装置 Expired - Lifetime JPH0616364Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986129080U JPH0616364Y2 (ja) 1986-08-25 1986-08-25 高精度移動ステ−ジ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986129080U JPH0616364Y2 (ja) 1986-08-25 1986-08-25 高精度移動ステ−ジ装置

Publications (2)

Publication Number Publication Date
JPS6335991U true JPS6335991U (enrdf_load_stackoverflow) 1988-03-08
JPH0616364Y2 JPH0616364Y2 (ja) 1994-04-27

Family

ID=31025332

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986129080U Expired - Lifetime JPH0616364Y2 (ja) 1986-08-25 1986-08-25 高精度移動ステ−ジ装置

Country Status (1)

Country Link
JP (1) JPH0616364Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990013790A1 (en) * 1989-04-28 1990-11-15 Nissha Printing Co., Ltd. Positioning table

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5567694A (en) * 1978-11-16 1980-05-21 Tokyo Shibaura Electric Co Automatic parallel table
JPS59129636A (ja) * 1983-01-10 1984-07-26 Hitachi Ltd 6自由度を有するステ−ジの制御装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5567694A (en) * 1978-11-16 1980-05-21 Tokyo Shibaura Electric Co Automatic parallel table
JPS59129636A (ja) * 1983-01-10 1984-07-26 Hitachi Ltd 6自由度を有するステ−ジの制御装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990013790A1 (en) * 1989-04-28 1990-11-15 Nissha Printing Co., Ltd. Positioning table

Also Published As

Publication number Publication date
JPH0616364Y2 (ja) 1994-04-27

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