JPH01106563U - - Google Patents

Info

Publication number
JPH01106563U
JPH01106563U JP20127487U JP20127487U JPH01106563U JP H01106563 U JPH01106563 U JP H01106563U JP 20127487 U JP20127487 U JP 20127487U JP 20127487 U JP20127487 U JP 20127487U JP H01106563 U JPH01106563 U JP H01106563U
Authority
JP
Japan
Prior art keywords
holding member
separation
driving means
thermal cvd
driving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20127487U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0616921Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20127487U priority Critical patent/JPH0616921Y2/ja
Publication of JPH01106563U publication Critical patent/JPH01106563U/ja
Application granted granted Critical
Publication of JPH0616921Y2 publication Critical patent/JPH0616921Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP20127487U 1987-12-29 1987-12-29 熱ｃｖｄ装置 Expired - Lifetime JPH0616921Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20127487U JPH0616921Y2 (ja) 1987-12-29 1987-12-29 熱ｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20127487U JPH0616921Y2 (ja) 1987-12-29 1987-12-29 熱ｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPH01106563U true JPH01106563U (enrdf_load_stackoverflow) 1989-07-18
JPH0616921Y2 JPH0616921Y2 (ja) 1994-05-02

Family

ID=31491644

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20127487U Expired - Lifetime JPH0616921Y2 (ja) 1987-12-29 1987-12-29 熱ｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPH0616921Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0616921Y2 (ja) 1994-05-02

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