JPH0616921Y2 - 熱ｃｖｄ装置 - Google Patents

熱ｃｖｄ装置

Info

Publication number
JPH0616921Y2
JPH0616921Y2 JP20127487U JP20127487U JPH0616921Y2 JP H0616921 Y2 JPH0616921 Y2 JP H0616921Y2 JP 20127487 U JP20127487 U JP 20127487U JP 20127487 U JP20127487 U JP 20127487U JP H0616921 Y2 JPH0616921 Y2 JP H0616921Y2
Authority
JP
Japan
Prior art keywords
holding member
axis
work
motor
screw rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP20127487U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01106563U (enrdf_load_stackoverflow
Inventor
佳興 横山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP20127487U priority Critical patent/JPH0616921Y2/ja
Publication of JPH01106563U publication Critical patent/JPH01106563U/ja
Application granted granted Critical
Publication of JPH0616921Y2 publication Critical patent/JPH0616921Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP20127487U 1987-12-29 1987-12-29 熱ｃｖｄ装置 Expired - Lifetime JPH0616921Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20127487U JPH0616921Y2 (ja) 1987-12-29 1987-12-29 熱ｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20127487U JPH0616921Y2 (ja) 1987-12-29 1987-12-29 熱ｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPH01106563U JPH01106563U (enrdf_load_stackoverflow) 1989-07-18
JPH0616921Y2 true JPH0616921Y2 (ja) 1994-05-02

Family

ID=31491644

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20127487U Expired - Lifetime JPH0616921Y2 (ja) 1987-12-29 1987-12-29 熱ｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPH0616921Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH01106563U (enrdf_load_stackoverflow) 1989-07-18

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