JPH0616364Y2 - 高精度移動ステ−ジ装置 - Google Patents
高精度移動ステ−ジ装置Info
- Publication number
- JPH0616364Y2 JPH0616364Y2 JP1986129080U JP12908086U JPH0616364Y2 JP H0616364 Y2 JPH0616364 Y2 JP H0616364Y2 JP 1986129080 U JP1986129080 U JP 1986129080U JP 12908086 U JP12908086 U JP 12908086U JP H0616364 Y2 JPH0616364 Y2 JP H0616364Y2
- Authority
- JP
- Japan
- Prior art keywords
- stage
- holder
- guide member
- theta
- drive mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims description 14
- 235000012431 wafers Nutrition 0.000 description 6
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986129080U JPH0616364Y2 (ja) | 1986-08-25 | 1986-08-25 | 高精度移動ステ−ジ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986129080U JPH0616364Y2 (ja) | 1986-08-25 | 1986-08-25 | 高精度移動ステ−ジ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6335991U JPS6335991U (enrdf_load_stackoverflow) | 1988-03-08 |
| JPH0616364Y2 true JPH0616364Y2 (ja) | 1994-04-27 |
Family
ID=31025332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986129080U Expired - Lifetime JPH0616364Y2 (ja) | 1986-08-25 | 1986-08-25 | 高精度移動ステ−ジ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0616364Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2523177B2 (ja) * | 1989-04-28 | 1996-08-07 | 日本写真印刷株式会社 | 位置決めテ―ブル |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5567694A (en) * | 1978-11-16 | 1980-05-21 | Tokyo Shibaura Electric Co | Automatic parallel table |
| JPS59129636A (ja) * | 1983-01-10 | 1984-07-26 | Hitachi Ltd | ６自由度を有するステ−ジの制御装置 |
-
1986
- 1986-08-25 JP JP1986129080U patent/JPH0616364Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6335991U (enrdf_load_stackoverflow) | 1988-03-08 |
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