JPS59128814A - 圧電振動子 - Google Patents
圧電振動子Info
- Publication number
- JPS59128814A JPS59128814A JP378283A JP378283A JPS59128814A JP S59128814 A JPS59128814 A JP S59128814A JP 378283 A JP378283 A JP 378283A JP 378283 A JP378283 A JP 378283A JP S59128814 A JPS59128814 A JP S59128814A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- piezoelectric vibrator
- piezoelectric vibrating
- vibrating member
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims description 5
- 239000013078 crystal Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- GNLJOAHHAPACCT-UHFFFAOYSA-N 4-diethoxyphosphorylmorpholine Chemical compound CCOP(=O)(OCC)N1CCOCC1 GNLJOAHHAPACCT-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/0595—Holders or supports the holder support and resonator being formed in one body
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP378283A JPS59128814A (ja) | 1983-01-13 | 1983-01-13 | 圧電振動子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP378283A JPS59128814A (ja) | 1983-01-13 | 1983-01-13 | 圧電振動子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59128814A true JPS59128814A (ja) | 1984-07-25 |
JPH0259648B2 JPH0259648B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-12-13 |
Family
ID=11566753
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP378283A Granted JPS59128814A (ja) | 1983-01-13 | 1983-01-13 | 圧電振動子 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59128814A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2577362A1 (fr) * | 1985-02-13 | 1986-08-14 | Ebauchesfabrik Eta Ag | Procede de fabrication de resonateurs a quartz a haute frequence |
JPS637815U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1986-06-30 | 1988-01-19 | ||
JPH0253313A (ja) * | 1988-08-18 | 1990-02-22 | Fujitsu Ltd | 振動子 |
JPH03139912A (ja) * | 1989-10-25 | 1991-06-14 | Nippon Dempa Kogyo Co Ltd | 圧電振動子 |
US6518688B1 (en) | 1999-03-01 | 2003-02-11 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric vibration device |
JP2014075848A (ja) * | 2014-01-14 | 2014-04-24 | Seiko Epson Corp | 振動片および振動子 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4827689A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1971-08-12 | 1973-04-12 | ||
JPS5177087A (ja) * | 1974-12-27 | 1976-07-03 | Seiko Instr & Electronics | Atsumisuberiketsushoshindoshi |
JPS5323588A (en) * | 1976-08-18 | 1978-03-04 | Matsushima Kogyo Kk | Quartz vibrator |
-
1983
- 1983-01-13 JP JP378283A patent/JPS59128814A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4827689A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1971-08-12 | 1973-04-12 | ||
JPS5177087A (ja) * | 1974-12-27 | 1976-07-03 | Seiko Instr & Electronics | Atsumisuberiketsushoshindoshi |
JPS5323588A (en) * | 1976-08-18 | 1978-03-04 | Matsushima Kogyo Kk | Quartz vibrator |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2577362A1 (fr) * | 1985-02-13 | 1986-08-14 | Ebauchesfabrik Eta Ag | Procede de fabrication de resonateurs a quartz a haute frequence |
JPS61189715A (ja) * | 1985-02-13 | 1986-08-23 | エタ ソシエテ アノニム フアブリク デボーシユ | 水晶共振器の製造方法およびその製造方法による水晶共振器 |
JPS637815U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1986-06-30 | 1988-01-19 | ||
JPH0253313A (ja) * | 1988-08-18 | 1990-02-22 | Fujitsu Ltd | 振動子 |
JPH03139912A (ja) * | 1989-10-25 | 1991-06-14 | Nippon Dempa Kogyo Co Ltd | 圧電振動子 |
US6518688B1 (en) | 1999-03-01 | 2003-02-11 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric vibration device |
JP2014075848A (ja) * | 2014-01-14 | 2014-04-24 | Seiko Epson Corp | 振動片および振動子 |
Also Published As
Publication number | Publication date |
---|---|
JPH0259648B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-12-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4259842B2 (ja) | 圧電共振子およびケースに密封された圧電共振子を備える組立品 | |
CN102142827A (zh) | 振动体、振动装置以及电子设备 | |
EP2947422B1 (en) | Angular velocity sensor | |
US6880399B1 (en) | Angular velocity sensor | |
JPS59128814A (ja) | 圧電振動子 | |
JPS613514A (ja) | 圧電振動子 | |
JP6442899B2 (ja) | 振動デバイス、電子機器、および移動体 | |
JPH0818390A (ja) | 弾性表面波装置 | |
JPS59128813A (ja) | 圧電振動子 | |
JP5240931B2 (ja) | 圧電振動子及び圧電発振器 | |
JPH1188104A (ja) | Atカット水晶振動子 | |
JPH08159779A (ja) | 振動ジャイロ | |
JPH11274891A (ja) | 圧電振動子、およびそれを用いた圧電振動子ユニット並びに圧電発振器 | |
JP2011205266A (ja) | 振動片および振動デバイス | |
JP2010236956A (ja) | 慣性センサモジュール | |
KR100198306B1 (ko) | 진동 자이로스코프 | |
JPH11251863A (ja) | 圧電振動子 | |
JP2000155029A (ja) | 角速度センサ | |
JPS59128812A (ja) | 圧電振動子 | |
JPS613513A (ja) | 圧電振動子 | |
JPS5812762B2 (ja) | 水晶発振体 | |
JPH05335871A (ja) | 電子部品 | |
JP2000114911A (ja) | 圧電デバイス | |
JP5302733B2 (ja) | 圧電振動子及び圧電発振器 | |
JPH01277013A (ja) | 圧電振動子の保持構造 |