JPS59126687A - リフトオフ法によるパタ−ン形成法 - Google Patents
リフトオフ法によるパタ−ン形成法Info
- Publication number
- JPS59126687A JPS59126687A JP58001185A JP118583A JPS59126687A JP S59126687 A JPS59126687 A JP S59126687A JP 58001185 A JP58001185 A JP 58001185A JP 118583 A JP118583 A JP 118583A JP S59126687 A JPS59126687 A JP S59126687A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- coating layer
- cutting die
- deposit
- deposited
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 22
- 230000007261 regionalization Effects 0.000 title description 2
- 238000005520 cutting process Methods 0.000 claims abstract description 27
- 238000004080 punching Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 abstract description 45
- 239000011247 coating layer Substances 0.000 abstract description 28
- 230000010358 mechanical oscillation Effects 0.000 abstract 2
- 239000000126 substance Substances 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 238000000059 patterning Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910000978 Pb alloy Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000013049 sediment Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Drying Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58001185A JPS59126687A (ja) | 1983-01-10 | 1983-01-10 | リフトオフ法によるパタ−ン形成法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58001185A JPS59126687A (ja) | 1983-01-10 | 1983-01-10 | リフトオフ法によるパタ−ン形成法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59126687A true JPS59126687A (ja) | 1984-07-21 |
| JPS6260833B2 JPS6260833B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-12-18 |
Family
ID=11494387
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58001185A Granted JPS59126687A (ja) | 1983-01-10 | 1983-01-10 | リフトオフ法によるパタ−ン形成法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59126687A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1983
- 1983-01-10 JP JP58001185A patent/JPS59126687A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6260833B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-12-18 |
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