JPS6260833B2 - - Google Patents
Info
- Publication number
- JPS6260833B2 JPS6260833B2 JP58001185A JP118583A JPS6260833B2 JP S6260833 B2 JPS6260833 B2 JP S6260833B2 JP 58001185 A JP58001185 A JP 58001185A JP 118583 A JP118583 A JP 118583A JP S6260833 B2 JPS6260833 B2 JP S6260833B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- cutting die
- coating layer
- deposited
- lift
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010410 layer Substances 0.000 claims description 48
- 238000005520 cutting process Methods 0.000 claims description 42
- 239000011247 coating layer Substances 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 26
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- MVPPADPHJFYWMZ-UHFFFAOYSA-N chlorobenzene Chemical compound ClC1=CC=CC=C1 MVPPADPHJFYWMZ-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 230000007261 regionalization Effects 0.000 description 2
- 229910000978 Pb alloy Inorganic materials 0.000 description 1
- 229910020174 Pb-In Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Drying Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58001185A JPS59126687A (ja) | 1983-01-10 | 1983-01-10 | リフトオフ法によるパタ−ン形成法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58001185A JPS59126687A (ja) | 1983-01-10 | 1983-01-10 | リフトオフ法によるパタ−ン形成法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59126687A JPS59126687A (ja) | 1984-07-21 |
| JPS6260833B2 true JPS6260833B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-12-18 |
Family
ID=11494387
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58001185A Granted JPS59126687A (ja) | 1983-01-10 | 1983-01-10 | リフトオフ法によるパタ−ン形成法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59126687A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1983
- 1983-01-10 JP JP58001185A patent/JPS59126687A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59126687A (ja) | 1984-07-21 |
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