JPS59114830A - 窒化シリコン膜の製造方法 - Google Patents

窒化シリコン膜の製造方法

Info

Publication number
JPS59114830A
JPS59114830A JP57223051A JP22305182A JPS59114830A JP S59114830 A JPS59114830 A JP S59114830A JP 57223051 A JP57223051 A JP 57223051A JP 22305182 A JP22305182 A JP 22305182A JP S59114830 A JPS59114830 A JP S59114830A
Authority
JP
Japan
Prior art keywords
film
sin film
sin
heat treatment
spattering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57223051A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6367334B2 (cg-RX-API-DMAC10.html
Inventor
Toshiaki Miyajima
利明 宮嶋
Masayoshi Koba
木場　正義
Atsushi Kudo
淳 工藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP57223051A priority Critical patent/JPS59114830A/ja
Publication of JPS59114830A publication Critical patent/JPS59114830A/ja
Publication of JPS6367334B2 publication Critical patent/JPS6367334B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/69433—

Landscapes

  • Formation Of Insulating Films (AREA)
JP57223051A 1982-12-21 1982-12-21 窒化シリコン膜の製造方法 Granted JPS59114830A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57223051A JPS59114830A (ja) 1982-12-21 1982-12-21 窒化シリコン膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57223051A JPS59114830A (ja) 1982-12-21 1982-12-21 窒化シリコン膜の製造方法

Publications (2)

Publication Number Publication Date
JPS59114830A true JPS59114830A (ja) 1984-07-03
JPS6367334B2 JPS6367334B2 (cg-RX-API-DMAC10.html) 1988-12-26

Family

ID=16792062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57223051A Granted JPS59114830A (ja) 1982-12-21 1982-12-21 窒化シリコン膜の製造方法

Country Status (1)

Country Link
JP (1) JPS59114830A (cg-RX-API-DMAC10.html)

Also Published As

Publication number Publication date
JPS6367334B2 (cg-RX-API-DMAC10.html) 1988-12-26

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