JPS5897609A - マ−ク位置検出装置 - Google Patents

マ−ク位置検出装置

Info

Publication number
JPS5897609A
JPS5897609A JP19656881A JP19656881A JPS5897609A JP S5897609 A JPS5897609 A JP S5897609A JP 19656881 A JP19656881 A JP 19656881A JP 19656881 A JP19656881 A JP 19656881A JP S5897609 A JPS5897609 A JP S5897609A
Authority
JP
Japan
Prior art keywords
mark
output
electron beam
signal
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19656881A
Other languages
English (en)
Japanese (ja)
Other versions
JPH029281B2 (enrdf_load_stackoverflow
Inventor
Hideo Kusakabe
秀雄 日下部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP19656881A priority Critical patent/JPS5897609A/ja
Publication of JPS5897609A publication Critical patent/JPS5897609A/ja
Publication of JPH029281B2 publication Critical patent/JPH029281B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Electron Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
JP19656881A 1981-12-07 1981-12-07 マ−ク位置検出装置 Granted JPS5897609A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19656881A JPS5897609A (ja) 1981-12-07 1981-12-07 マ−ク位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19656881A JPS5897609A (ja) 1981-12-07 1981-12-07 マ−ク位置検出装置

Publications (2)

Publication Number Publication Date
JPS5897609A true JPS5897609A (ja) 1983-06-10
JPH029281B2 JPH029281B2 (enrdf_load_stackoverflow) 1990-03-01

Family

ID=16359896

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19656881A Granted JPS5897609A (ja) 1981-12-07 1981-12-07 マ−ク位置検出装置

Country Status (1)

Country Link
JP (1) JPS5897609A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63178523A (ja) * 1987-01-20 1988-07-22 Toshiba Corp 自動焦点合わせ方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63178523A (ja) * 1987-01-20 1988-07-22 Toshiba Corp 自動焦点合わせ方法

Also Published As

Publication number Publication date
JPH029281B2 (enrdf_load_stackoverflow) 1990-03-01

Similar Documents

Publication Publication Date Title
JPH0474648B2 (enrdf_load_stackoverflow)
JPS639807A (ja) 膜厚測定方法およびその装置
JPS5897609A (ja) マ−ク位置検出装置
JPH11142109A (ja) ３次元計測装置、及び３次元計測方法
JPS61290313A (ja) 立体形状測定装置
JPH041494B2 (enrdf_load_stackoverflow)
JP3479515B2 (ja) 変位測定装置および方法
JPS58223326A (ja) マ−ク幅測定装置
JPS6262208A (ja) 距離測定装置および距離測定方法
JPH0240506A (ja) 測距装置
JP3526724B2 (ja) 形状測定装置における誤差補正方法
JPH08145623A (ja) 変位測定装置
JPS6478206A (en) Detecting method for defocusing quantity
JPS61225604A (ja) 寸法測定方法
JPS63128207A (ja) 実装部品検査装置
JPH04274711A (ja) 荷電ビームを用いたパターン寸法測定方法
JPH01113608A (ja) 光学式変位測定装置
JPH05248830A (ja) ３次元形状測定装置
JPS62298705A (ja) リニアセンサ光源制御方式
JPH07280514A (ja) 変位計
JPH05167129A (ja) 画像処理によるレーザスポットの中心算出方法
JPH02300617A (ja) 形状測定装置
JPH07234115A (ja) 板材の反り量測定方法
JPS5969924A (ja) マ−ク位置検出装置
JPS59194006U (ja) 光学式測定機器におけるエツジ検出装置