JPH029281B2 - - Google Patents

Info

Publication number
JPH029281B2
JPH029281B2 JP19656881A JP19656881A JPH029281B2 JP H029281 B2 JPH029281 B2 JP H029281B2 JP 19656881 A JP19656881 A JP 19656881A JP 19656881 A JP19656881 A JP 19656881A JP H029281 B2 JPH029281 B2 JP H029281B2
Authority
JP
Japan
Prior art keywords
mark
signal
electron beam
output
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19656881A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5897609A (ja
Inventor
Hideo Kusakabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP19656881A priority Critical patent/JPS5897609A/ja
Publication of JPS5897609A publication Critical patent/JPS5897609A/ja
Publication of JPH029281B2 publication Critical patent/JPH029281B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Electron Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
JP19656881A 1981-12-07 1981-12-07 マ−ク位置検出装置 Granted JPS5897609A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19656881A JPS5897609A (ja) 1981-12-07 1981-12-07 マ−ク位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19656881A JPS5897609A (ja) 1981-12-07 1981-12-07 マ−ク位置検出装置

Publications (2)

Publication Number Publication Date
JPS5897609A JPS5897609A (ja) 1983-06-10
JPH029281B2 true JPH029281B2 (enrdf_load_stackoverflow) 1990-03-01

Family

ID=16359896

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19656881A Granted JPS5897609A (ja) 1981-12-07 1981-12-07 マ−ク位置検出装置

Country Status (1)

Country Link
JP (1) JPS5897609A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63178523A (ja) * 1987-01-20 1988-07-22 Toshiba Corp 自動焦点合わせ方法

Also Published As

Publication number Publication date
JPS5897609A (ja) 1983-06-10

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