JPS6233735B2 - - Google Patents
Info
- Publication number
- JPS6233735B2 JPS6233735B2 JP16755181A JP16755181A JPS6233735B2 JP S6233735 B2 JPS6233735 B2 JP S6233735B2 JP 16755181 A JP16755181 A JP 16755181A JP 16755181 A JP16755181 A JP 16755181A JP S6233735 B2 JPS6233735 B2 JP S6233735B2
- Authority
- JP
- Japan
- Prior art keywords
- mark
- signal
- output
- electron beam
- differential waveform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 21
- 238000001514 detection method Methods 0.000 claims description 14
- 230000001186 cumulative effect Effects 0.000 description 15
- 230000003111 delayed effect Effects 0.000 description 13
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000007257 malfunction Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
- H01J37/3045—Object or beam position registration
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16755181A JPS5868931A (ja) | 1981-10-20 | 1981-10-20 | マ−ク位置検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16755181A JPS5868931A (ja) | 1981-10-20 | 1981-10-20 | マ−ク位置検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5868931A JPS5868931A (ja) | 1983-04-25 |
| JPS6233735B2 true JPS6233735B2 (enrdf_load_stackoverflow) | 1987-07-22 |
Family
ID=15851809
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16755181A Granted JPS5868931A (ja) | 1981-10-20 | 1981-10-20 | マ−ク位置検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5868931A (enrdf_load_stackoverflow) |
-
1981
- 1981-10-20 JP JP16755181A patent/JPS5868931A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5868931A (ja) | 1983-04-25 |
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