JPS5868931A - マ−ク位置検出装置 - Google Patents

マ−ク位置検出装置

Info

Publication number
JPS5868931A
JPS5868931A JP16755181A JP16755181A JPS5868931A JP S5868931 A JPS5868931 A JP S5868931A JP 16755181 A JP16755181 A JP 16755181A JP 16755181 A JP16755181 A JP 16755181A JP S5868931 A JPS5868931 A JP S5868931A
Authority
JP
Japan
Prior art keywords
mark
output
electron beam
moment
sigmax
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16755181A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6233735B2 (enrdf_load_stackoverflow
Inventor
Hideo Kusakabe
秀雄 日下部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP16755181A priority Critical patent/JPS5868931A/ja
Publication of JPS5868931A publication Critical patent/JPS5868931A/ja
Publication of JPS6233735B2 publication Critical patent/JPS6233735B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
JP16755181A 1981-10-20 1981-10-20 マ−ク位置検出装置 Granted JPS5868931A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16755181A JPS5868931A (ja) 1981-10-20 1981-10-20 マ−ク位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16755181A JPS5868931A (ja) 1981-10-20 1981-10-20 マ−ク位置検出装置

Publications (2)

Publication Number Publication Date
JPS5868931A true JPS5868931A (ja) 1983-04-25
JPS6233735B2 JPS6233735B2 (enrdf_load_stackoverflow) 1987-07-22

Family

ID=15851809

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16755181A Granted JPS5868931A (ja) 1981-10-20 1981-10-20 マ−ク位置検出装置

Country Status (1)

Country Link
JP (1) JPS5868931A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6233735B2 (enrdf_load_stackoverflow) 1987-07-22

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