JPH041494B2 - - Google Patents

Info

Publication number
JPH041494B2
JPH041494B2 JP20663182A JP20663182A JPH041494B2 JP H041494 B2 JPH041494 B2 JP H041494B2 JP 20663182 A JP20663182 A JP 20663182A JP 20663182 A JP20663182 A JP 20663182A JP H041494 B2 JPH041494 B2 JP H041494B2
Authority
JP
Japan
Prior art keywords
mark
signal
electron beam
scanning
moment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP20663182A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5996725A (ja
Inventor
Hideo Kusakabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP20663182A priority Critical patent/JPS5996725A/ja
Publication of JPS5996725A publication Critical patent/JPS5996725A/ja
Publication of JPH041494B2 publication Critical patent/JPH041494B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP20663182A 1982-11-25 1982-11-25 マ−ク位置検出装置 Granted JPS5996725A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20663182A JPS5996725A (ja) 1982-11-25 1982-11-25 マ−ク位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20663182A JPS5996725A (ja) 1982-11-25 1982-11-25 マ−ク位置検出装置

Publications (2)

Publication Number Publication Date
JPS5996725A JPS5996725A (ja) 1984-06-04
JPH041494B2 true JPH041494B2 (enrdf_load_stackoverflow) 1992-01-13

Family

ID=16526558

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20663182A Granted JPS5996725A (ja) 1982-11-25 1982-11-25 マ−ク位置検出装置

Country Status (1)

Country Link
JP (1) JPS5996725A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62229939A (ja) * 1986-03-31 1987-10-08 Advantest Corp 荷電粒子ビ−ム露光装置におけるマ−ク位置検出回路

Also Published As

Publication number Publication date
JPS5996725A (ja) 1984-06-04

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