JPS5897203A - 透明導電膜の形成方法 - Google Patents

透明導電膜の形成方法

Info

Publication number
JPS5897203A
JPS5897203A JP19293581A JP19293581A JPS5897203A JP S5897203 A JPS5897203 A JP S5897203A JP 19293581 A JP19293581 A JP 19293581A JP 19293581 A JP19293581 A JP 19293581A JP S5897203 A JPS5897203 A JP S5897203A
Authority
JP
Japan
Prior art keywords
transparent conductive
conductive film
film
sputtering
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19293581A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0370326B2 (enExample
Inventor
英夫 田辺
砂原　和雄
熊田　政治
三角　明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP19293581A priority Critical patent/JPS5897203A/ja
Publication of JPS5897203A publication Critical patent/JPS5897203A/ja
Publication of JPH0370326B2 publication Critical patent/JPH0370326B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Electric Cables (AREA)
JP19293581A 1981-12-02 1981-12-02 透明導電膜の形成方法 Granted JPS5897203A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19293581A JPS5897203A (ja) 1981-12-02 1981-12-02 透明導電膜の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19293581A JPS5897203A (ja) 1981-12-02 1981-12-02 透明導電膜の形成方法

Publications (2)

Publication Number Publication Date
JPS5897203A true JPS5897203A (ja) 1983-06-09
JPH0370326B2 JPH0370326B2 (enExample) 1991-11-07

Family

ID=16299441

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19293581A Granted JPS5897203A (ja) 1981-12-02 1981-12-02 透明導電膜の形成方法

Country Status (1)

Country Link
JP (1) JPS5897203A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63909A (ja) * 1986-06-18 1988-01-05 松下電器産業株式会社 透明導電膜の形成方法
JPS63125676A (ja) * 1986-11-13 1988-05-28 Japan Aviation Electronics Ind Ltd スパツタリング成膜法
JPH0413859A (ja) * 1990-05-01 1992-01-17 Stec Kk 装飾用反応性スパッタ装置
CN110718322A (zh) * 2019-10-18 2020-01-21 江苏亨通电力电缆有限公司 风机桥架电缆

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56130009A (en) * 1980-03-17 1981-10-12 Sharp Kk Method of producing transparent conductive film

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56130009A (en) * 1980-03-17 1981-10-12 Sharp Kk Method of producing transparent conductive film

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63909A (ja) * 1986-06-18 1988-01-05 松下電器産業株式会社 透明導電膜の形成方法
JPS63125676A (ja) * 1986-11-13 1988-05-28 Japan Aviation Electronics Ind Ltd スパツタリング成膜法
JPH0413859A (ja) * 1990-05-01 1992-01-17 Stec Kk 装飾用反応性スパッタ装置
CN110718322A (zh) * 2019-10-18 2020-01-21 江苏亨通电力电缆有限公司 风机桥架电缆
CN110718322B (zh) * 2019-10-18 2021-02-09 江苏亨通电力电缆有限公司 风机桥架电缆

Also Published As

Publication number Publication date
JPH0370326B2 (enExample) 1991-11-07

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