JPH0370326B2 - - Google Patents

Info

Publication number
JPH0370326B2
JPH0370326B2 JP56192935A JP19293581A JPH0370326B2 JP H0370326 B2 JPH0370326 B2 JP H0370326B2 JP 56192935 A JP56192935 A JP 56192935A JP 19293581 A JP19293581 A JP 19293581A JP H0370326 B2 JPH0370326 B2 JP H0370326B2
Authority
JP
Japan
Prior art keywords
transparent conductive
conductive film
film
sputtering
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56192935A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5897203A (ja
Inventor
Hideo Tanabe
Kazuo Sunahara
Seiji Kumada
Akira Misumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP19293581A priority Critical patent/JPS5897203A/ja
Publication of JPS5897203A publication Critical patent/JPS5897203A/ja
Publication of JPH0370326B2 publication Critical patent/JPH0370326B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Electric Cables (AREA)
JP19293581A 1981-12-02 1981-12-02 透明導電膜の形成方法 Granted JPS5897203A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19293581A JPS5897203A (ja) 1981-12-02 1981-12-02 透明導電膜の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19293581A JPS5897203A (ja) 1981-12-02 1981-12-02 透明導電膜の形成方法

Publications (2)

Publication Number Publication Date
JPS5897203A JPS5897203A (ja) 1983-06-09
JPH0370326B2 true JPH0370326B2 (enExample) 1991-11-07

Family

ID=16299441

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19293581A Granted JPS5897203A (ja) 1981-12-02 1981-12-02 透明導電膜の形成方法

Country Status (1)

Country Link
JP (1) JPS5897203A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0740447B2 (ja) * 1986-06-18 1995-05-01 松下電器産業株式会社 透明導電膜の形成方法
JPS63125676A (ja) * 1986-11-13 1988-05-28 Japan Aviation Electronics Ind Ltd スパツタリング成膜法
JPH0413859A (ja) * 1990-05-01 1992-01-17 Stec Kk 装飾用反応性スパッタ装置
CN110718322B (zh) * 2019-10-18 2021-02-09 江苏亨通电力电缆有限公司 风机桥架电缆

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56130009A (en) * 1980-03-17 1981-10-12 Sharp Kk Method of producing transparent conductive film

Also Published As

Publication number Publication date
JPS5897203A (ja) 1983-06-09

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