JPH0338681B2 - - Google Patents
Info
- Publication number
- JPH0338681B2 JPH0338681B2 JP4738782A JP4738782A JPH0338681B2 JP H0338681 B2 JPH0338681 B2 JP H0338681B2 JP 4738782 A JP4738782 A JP 4738782A JP 4738782 A JP4738782 A JP 4738782A JP H0338681 B2 JPH0338681 B2 JP H0338681B2
- Authority
- JP
- Japan
- Prior art keywords
- transparent conductive
- conductive film
- forming
- film
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004544 sputter deposition Methods 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 12
- 239000007789 gas Substances 0.000 claims description 10
- 229910052760 oxygen Inorganic materials 0.000 claims description 7
- 229910052738 indium Inorganic materials 0.000 claims description 6
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 6
- 229910001128 Sn alloy Inorganic materials 0.000 claims description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- 230000001590 oxidative effect Effects 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- 238000002834 transmittance Methods 0.000 description 5
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 4
- 229910001882 dioxygen Inorganic materials 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000004611 spectroscopical analysis Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Manufacturing Of Electric Cables (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4738782A JPS58165212A (ja) | 1982-03-26 | 1982-03-26 | 透明導電膜の形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4738782A JPS58165212A (ja) | 1982-03-26 | 1982-03-26 | 透明導電膜の形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58165212A JPS58165212A (ja) | 1983-09-30 |
| JPH0338681B2 true JPH0338681B2 (enExample) | 1991-06-11 |
Family
ID=12773689
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4738782A Granted JPS58165212A (ja) | 1982-03-26 | 1982-03-26 | 透明導電膜の形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58165212A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2505885A2 (en) | 2011-03-31 | 2012-10-03 | Kabushiki Kaisha Toyota Jidoshokki | Relief valve for compressor |
| US8430647B2 (en) | 2008-08-27 | 2013-04-30 | Mitsubishi Heavy Industries, Ltd. | Compressor safety valve |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0759747B2 (ja) * | 1988-03-09 | 1995-06-28 | 日本真空技術株式会社 | 透明導電膜の製造方法 |
| JP5866815B2 (ja) * | 2011-06-21 | 2016-02-24 | 株式会社アルバック | 成膜方法 |
-
1982
- 1982-03-26 JP JP4738782A patent/JPS58165212A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8430647B2 (en) | 2008-08-27 | 2013-04-30 | Mitsubishi Heavy Industries, Ltd. | Compressor safety valve |
| EP2505885A2 (en) | 2011-03-31 | 2012-10-03 | Kabushiki Kaisha Toyota Jidoshokki | Relief valve for compressor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58165212A (ja) | 1983-09-30 |
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