JPS5893323A - 半導体製造装置 - Google Patents

半導体製造装置

Info

Publication number
JPS5893323A
JPS5893323A JP56192416A JP19241681A JPS5893323A JP S5893323 A JPS5893323 A JP S5893323A JP 56192416 A JP56192416 A JP 56192416A JP 19241681 A JP19241681 A JP 19241681A JP S5893323 A JPS5893323 A JP S5893323A
Authority
JP
Japan
Prior art keywords
gas
tube
reaction
reaction tube
quartz
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56192416A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0322051B2 (member.php
Inventor
Masakazu Morishita
正和 森下
Tadahiro Omi
忠弘 大見
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Research Foundation
Original Assignee
Semiconductor Research Foundation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Research Foundation filed Critical Semiconductor Research Foundation
Priority to JP56192416A priority Critical patent/JPS5893323A/ja
Publication of JPS5893323A publication Critical patent/JPS5893323A/ja
Publication of JPH0322051B2 publication Critical patent/JPH0322051B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • H10P14/24—
    • H10P14/3421—
    • H10P14/3442—

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP56192416A 1981-11-30 1981-11-30 半導体製造装置 Granted JPS5893323A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56192416A JPS5893323A (ja) 1981-11-30 1981-11-30 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56192416A JPS5893323A (ja) 1981-11-30 1981-11-30 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS5893323A true JPS5893323A (ja) 1983-06-03
JPH0322051B2 JPH0322051B2 (member.php) 1991-03-26

Family

ID=16290951

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56192416A Granted JPS5893323A (ja) 1981-11-30 1981-11-30 半導体製造装置

Country Status (1)

Country Link
JP (1) JPS5893323A (member.php)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0233921A (ja) * 1988-07-22 1990-02-05 Nec Kyushu Ltd 拡散炉装置
US5254229A (en) * 1989-08-18 1993-10-19 Tadahiro Ohmi Electrified object neutralizing method and neutralizing device
US5492862A (en) * 1993-01-12 1996-02-20 Tokyo Electron Limited Vacuum change neutralization method
US6092299A (en) * 1997-09-05 2000-07-25 Tokyo Electron Limited Vacuum processing apparatus
US6207006B1 (en) 1997-09-18 2001-03-27 Tokyo Electron Limited Vacuum processing apparatus
JP2002217118A (ja) * 2001-01-22 2002-08-02 Japan Pionics Co Ltd 窒化ガリウム膜半導体の製造装置、排ガス浄化装置、及び製造設備

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5975107B2 (ja) 2012-09-13 2016-08-23 理化工業株式会社 電力制御装置及び電力制御方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0233921A (ja) * 1988-07-22 1990-02-05 Nec Kyushu Ltd 拡散炉装置
US5254229A (en) * 1989-08-18 1993-10-19 Tadahiro Ohmi Electrified object neutralizing method and neutralizing device
US5492862A (en) * 1993-01-12 1996-02-20 Tokyo Electron Limited Vacuum change neutralization method
US6092299A (en) * 1997-09-05 2000-07-25 Tokyo Electron Limited Vacuum processing apparatus
US6207006B1 (en) 1997-09-18 2001-03-27 Tokyo Electron Limited Vacuum processing apparatus
JP2002217118A (ja) * 2001-01-22 2002-08-02 Japan Pionics Co Ltd 窒化ガリウム膜半導体の製造装置、排ガス浄化装置、及び製造設備

Also Published As

Publication number Publication date
JPH0322051B2 (member.php) 1991-03-26

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