JPS5886408A - 鏡面の微小凹凸または歪検査装置 - Google Patents

鏡面の微小凹凸または歪検査装置

Info

Publication number
JPS5886408A
JPS5886408A JP56183678A JP18367881A JPS5886408A JP S5886408 A JPS5886408 A JP S5886408A JP 56183678 A JP56183678 A JP 56183678A JP 18367881 A JP18367881 A JP 18367881A JP S5886408 A JPS5886408 A JP S5886408A
Authority
JP
Japan
Prior art keywords
sample
illuminance
light
luminous flux
photoelectric conversion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56183678A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0311403B2 (ref
Inventor
Koichi Kugimiya
公一 釘宮
Minoru Katsuyama
実 勝山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56183678A priority Critical patent/JPS5886408A/ja
Publication of JPS5886408A publication Critical patent/JPS5886408A/ja
Publication of JPH0311403B2 publication Critical patent/JPH0311403B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP56183678A 1981-11-18 1981-11-18 鏡面の微小凹凸または歪検査装置 Granted JPS5886408A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56183678A JPS5886408A (ja) 1981-11-18 1981-11-18 鏡面の微小凹凸または歪検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56183678A JPS5886408A (ja) 1981-11-18 1981-11-18 鏡面の微小凹凸または歪検査装置

Publications (2)

Publication Number Publication Date
JPS5886408A true JPS5886408A (ja) 1983-05-24
JPH0311403B2 JPH0311403B2 (ref) 1991-02-15

Family

ID=16140006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56183678A Granted JPS5886408A (ja) 1981-11-18 1981-11-18 鏡面の微小凹凸または歪検査装置

Country Status (1)

Country Link
JP (1) JPS5886408A (ref)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6170405A (ja) * 1984-09-13 1986-04-11 Toshiba Glass Co Ltd 球面形状の測定装置
JPS6316216A (ja) * 1986-07-08 1988-01-23 Mitsubishi Electric Corp 距離計
JPH02122539A (ja) * 1988-10-31 1990-05-10 Fujitsu Ltd Ｓｏｉ基板の検査方法
JP2006266934A (ja) * 2005-03-24 2006-10-05 Sumitomo Electric Ind Ltd フィルムの欠陥検出方法および欠陥検出装置
JP2006292668A (ja) * 2005-04-14 2006-10-26 Matsushita Electric Ind Co Ltd 表面検査装置および表面検査方法
US8466673B2 (en) 2007-08-23 2013-06-18 Jfe Steel Corporation Method and apparatus for detecting concavo-convex shape surface defects
JP2018147928A (ja) * 2017-03-01 2018-09-20 株式会社ディスコ 半導体インゴットの検査方法、検査装置及びレーザー加工装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5263753A (en) * 1975-11-20 1977-05-26 Bendix Corp Apparatus for discriminating surface characteristic of object
JPS5599045A (en) * 1979-01-24 1980-07-28 Japan Spectroscopic Co Surface reflection measuring apparatus
JPS55101002A (en) * 1979-01-26 1980-08-01 Hitachi Ltd Inspecting method for mirror face body

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5263753A (en) * 1975-11-20 1977-05-26 Bendix Corp Apparatus for discriminating surface characteristic of object
JPS5599045A (en) * 1979-01-24 1980-07-28 Japan Spectroscopic Co Surface reflection measuring apparatus
JPS55101002A (en) * 1979-01-26 1980-08-01 Hitachi Ltd Inspecting method for mirror face body

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6170405A (ja) * 1984-09-13 1986-04-11 Toshiba Glass Co Ltd 球面形状の測定装置
JPS6316216A (ja) * 1986-07-08 1988-01-23 Mitsubishi Electric Corp 距離計
JPH02122539A (ja) * 1988-10-31 1990-05-10 Fujitsu Ltd Ｓｏｉ基板の検査方法
JP2006266934A (ja) * 2005-03-24 2006-10-05 Sumitomo Electric Ind Ltd フィルムの欠陥検出方法および欠陥検出装置
JP2006292668A (ja) * 2005-04-14 2006-10-26 Matsushita Electric Ind Co Ltd 表面検査装置および表面検査方法
US8466673B2 (en) 2007-08-23 2013-06-18 Jfe Steel Corporation Method and apparatus for detecting concavo-convex shape surface defects
JP2018147928A (ja) * 2017-03-01 2018-09-20 株式会社ディスコ 半導体インゴットの検査方法、検査装置及びレーザー加工装置

Also Published As

Publication number Publication date
JPH0311403B2 (ref) 1991-02-15

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