JPS5884404A - 薄膜サ−ミスタ - Google Patents

薄膜サ−ミスタ

Info

Publication number
JPS5884404A
JPS5884404A JP56182066A JP18206681A JPS5884404A JP S5884404 A JPS5884404 A JP S5884404A JP 56182066 A JP56182066 A JP 56182066A JP 18206681 A JP18206681 A JP 18206681A JP S5884404 A JPS5884404 A JP S5884404A
Authority
JP
Japan
Prior art keywords
thin film
film thermistor
temperature
shielding plate
support container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56182066A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6252926B2 (OSRAM
Inventor
彪 長井
一志 山本
郁夫 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56182066A priority Critical patent/JPS5884404A/ja
Publication of JPS5884404A publication Critical patent/JPS5884404A/ja
Publication of JPS6252926B2 publication Critical patent/JPS6252926B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Thermistors And Varistors (AREA)
JP56182066A 1981-11-12 1981-11-12 薄膜サ−ミスタ Granted JPS5884404A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56182066A JPS5884404A (ja) 1981-11-12 1981-11-12 薄膜サ−ミスタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56182066A JPS5884404A (ja) 1981-11-12 1981-11-12 薄膜サ−ミスタ

Publications (2)

Publication Number Publication Date
JPS5884404A true JPS5884404A (ja) 1983-05-20
JPS6252926B2 JPS6252926B2 (OSRAM) 1987-11-07

Family

ID=16111747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56182066A Granted JPS5884404A (ja) 1981-11-12 1981-11-12 薄膜サ−ミスタ

Country Status (1)

Country Link
JP (1) JPS5884404A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62202501A (ja) * 1986-02-28 1987-09-07 松下電器産業株式会社 薄膜サ−ミスタ
JPS62219502A (ja) * 1986-03-19 1987-09-26 松下電器産業株式会社 薄膜サ−ミスタ

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01129411A (ja) * 1987-11-16 1989-05-22 Fujitsu Ltd ウェーハ処理装置
KR102455392B1 (ko) 2018-07-30 2022-10-14 삼성전자주식회사 세정수 처리 장치, 플라즈마 리액션 탱크 및 세정수 처리 방법

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62202501A (ja) * 1986-02-28 1987-09-07 松下電器産業株式会社 薄膜サ−ミスタ
JPS62219502A (ja) * 1986-03-19 1987-09-26 松下電器産業株式会社 薄膜サ−ミスタ

Also Published As

Publication number Publication date
JPS6252926B2 (OSRAM) 1987-11-07

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