JPS6252926B2 - - Google Patents
Info
- Publication number
- JPS6252926B2 JPS6252926B2 JP18206681A JP18206681A JPS6252926B2 JP S6252926 B2 JPS6252926 B2 JP S6252926B2 JP 18206681 A JP18206681 A JP 18206681A JP 18206681 A JP18206681 A JP 18206681A JP S6252926 B2 JPS6252926 B2 JP S6252926B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film thermistor
- thermistor chip
- insulating coating
- shielding plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 33
- 239000011248 coating agent Substances 0.000 claims description 22
- 238000000576 coating method Methods 0.000 claims description 22
- 239000010408 film Substances 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 12
- 238000005219 brazing Methods 0.000 claims description 8
- 239000000919 ceramic Substances 0.000 claims description 6
- 239000011888 foil Substances 0.000 description 10
- 239000010936 titanium Substances 0.000 description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 7
- 238000010411 cooking Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910007472 ZnO—B2O3—SiO2 Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000001723 curing Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006355 external stress Effects 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Thermistors And Varistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56182066A JPS5884404A (ja) | 1981-11-12 | 1981-11-12 | 薄膜サ−ミスタ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56182066A JPS5884404A (ja) | 1981-11-12 | 1981-11-12 | 薄膜サ−ミスタ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5884404A JPS5884404A (ja) | 1983-05-20 |
| JPS6252926B2 true JPS6252926B2 (OSRAM) | 1987-11-07 |
Family
ID=16111747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56182066A Granted JPS5884404A (ja) | 1981-11-12 | 1981-11-12 | 薄膜サ−ミスタ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5884404A (OSRAM) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01129411A (ja) * | 1987-11-16 | 1989-05-22 | Fujitsu Ltd | ウェーハ処理装置 |
| US11107705B2 (en) | 2018-07-30 | 2021-08-31 | Samsung Electronics Co., Ltd. | Cleaning solution production systems and methods, and plasma reaction tanks |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62202501A (ja) * | 1986-02-28 | 1987-09-07 | 松下電器産業株式会社 | 薄膜サ−ミスタ |
| JPH0638363B2 (ja) * | 1986-03-19 | 1994-05-18 | 松下電器産業株式会社 | 薄膜サ−ミスタ |
-
1981
- 1981-11-12 JP JP56182066A patent/JPS5884404A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01129411A (ja) * | 1987-11-16 | 1989-05-22 | Fujitsu Ltd | ウェーハ処理装置 |
| US11107705B2 (en) | 2018-07-30 | 2021-08-31 | Samsung Electronics Co., Ltd. | Cleaning solution production systems and methods, and plasma reaction tanks |
| US11664242B2 (en) | 2018-07-30 | 2023-05-30 | Samsung Electronics Co., Ltd. | Cleaning solution production systems and methods, and plasma reaction tanks |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5884404A (ja) | 1983-05-20 |
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