JPS622684B2 - - Google Patents
Info
- Publication number
- JPS622684B2 JPS622684B2 JP17038281A JP17038281A JPS622684B2 JP S622684 B2 JPS622684 B2 JP S622684B2 JP 17038281 A JP17038281 A JP 17038281A JP 17038281 A JP17038281 A JP 17038281A JP S622684 B2 JPS622684 B2 JP S622684B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- foil
- film thermistor
- temperature
- insulating coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011248 coating agent Substances 0.000 claims description 36
- 238000000576 coating method Methods 0.000 claims description 36
- 239000010409 thin film Substances 0.000 claims description 27
- 239000011888 foil Substances 0.000 claims description 17
- 239000010408 film Substances 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 11
- 239000010936 titanium Substances 0.000 claims description 11
- 239000011521 glass Substances 0.000 claims description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 5
- 238000005219 brazing Methods 0.000 claims description 5
- 230000008018 melting Effects 0.000 claims description 5
- 238000002844 melting Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 claims description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 1
- 239000011253 protective coating Substances 0.000 claims 1
- 238000010411 cooking Methods 0.000 description 4
- 239000012530 fluid Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000009835 boiling Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- 229910007472 ZnO—B2O3—SiO2 Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
Landscapes
- Thermistors And Varistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56170382A JPS5871602A (ja) | 1981-10-23 | 1981-10-23 | 薄膜サ−ミスタ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56170382A JPS5871602A (ja) | 1981-10-23 | 1981-10-23 | 薄膜サ−ミスタ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5871602A JPS5871602A (ja) | 1983-04-28 |
| JPS622684B2 true JPS622684B2 (OSRAM) | 1987-01-21 |
Family
ID=15903895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56170382A Granted JPS5871602A (ja) | 1981-10-23 | 1981-10-23 | 薄膜サ−ミスタ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5871602A (OSRAM) |
-
1981
- 1981-10-23 JP JP56170382A patent/JPS5871602A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5871602A (ja) | 1983-04-28 |
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