JPS5871603A - 薄膜サ−ミスタの製造方法 - Google Patents

薄膜サ−ミスタの製造方法

Info

Publication number
JPS5871603A
JPS5871603A JP56170383A JP17038381A JPS5871603A JP S5871603 A JPS5871603 A JP S5871603A JP 56170383 A JP56170383 A JP 56170383A JP 17038381 A JP17038381 A JP 17038381A JP S5871603 A JPS5871603 A JP S5871603A
Authority
JP
Japan
Prior art keywords
thermistor
manufacturing
thin film
chip
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56170383A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6252924B2 (enrdf_load_stackoverflow
Inventor
一志 山本
彪 長井
郁夫 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56170383A priority Critical patent/JPS5871603A/ja
Publication of JPS5871603A publication Critical patent/JPS5871603A/ja
Publication of JPS6252924B2 publication Critical patent/JPS6252924B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Thermistors And Varistors (AREA)
JP56170383A 1981-10-23 1981-10-23 薄膜サ−ミスタの製造方法 Granted JPS5871603A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56170383A JPS5871603A (ja) 1981-10-23 1981-10-23 薄膜サ−ミスタの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56170383A JPS5871603A (ja) 1981-10-23 1981-10-23 薄膜サ−ミスタの製造方法

Publications (2)

Publication Number Publication Date
JPS5871603A true JPS5871603A (ja) 1983-04-28
JPS6252924B2 JPS6252924B2 (enrdf_load_stackoverflow) 1987-11-07

Family

ID=15903911

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56170383A Granted JPS5871603A (ja) 1981-10-23 1981-10-23 薄膜サ−ミスタの製造方法

Country Status (1)

Country Link
JP (1) JPS5871603A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63310101A (ja) * 1987-06-12 1988-12-19 Nok Corp 薄膜サ−ミスタの製造法
JPH04105304A (ja) * 1990-08-23 1992-04-07 Murata Mfg Co Ltd 磁器半導体素子の電極形成方法
JPH04105303A (ja) * 1990-08-23 1992-04-07 Murata Mfg Co Ltd 磁器半導体素子の電極形成方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7115902B1 (en) 1990-11-20 2006-10-03 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and method for manufacturing the same
US5849601A (en) 1990-12-25 1998-12-15 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and method for manufacturing the same
US7098479B1 (en) 1990-12-25 2006-08-29 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and method for manufacturing the same
US7576360B2 (en) 1990-12-25 2009-08-18 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device which comprises thin film transistors and method for manufacturing the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63310101A (ja) * 1987-06-12 1988-12-19 Nok Corp 薄膜サ−ミスタの製造法
JPH04105304A (ja) * 1990-08-23 1992-04-07 Murata Mfg Co Ltd 磁器半導体素子の電極形成方法
JPH04105303A (ja) * 1990-08-23 1992-04-07 Murata Mfg Co Ltd 磁器半導体素子の電極形成方法

Also Published As

Publication number Publication date
JPS6252924B2 (enrdf_load_stackoverflow) 1987-11-07

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