JPS5864017A - セラミツクコンデンサ−及びその製造方法 - Google Patents
セラミツクコンデンサ−及びその製造方法Info
- Publication number
- JPS5864017A JPS5864017A JP57111413A JP11141382A JPS5864017A JP S5864017 A JPS5864017 A JP S5864017A JP 57111413 A JP57111413 A JP 57111413A JP 11141382 A JP11141382 A JP 11141382A JP S5864017 A JPS5864017 A JP S5864017A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- capacitor
- sputter
- electrode
- ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 26
- 239000000919 ceramic Substances 0.000 title claims description 21
- 239000003990 capacitor Substances 0.000 claims description 75
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 26
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 20
- 229910052709 silver Inorganic materials 0.000 claims description 20
- 239000004332 silver Substances 0.000 claims description 20
- 238000004544 sputter deposition Methods 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 13
- 229910052759 nickel Inorganic materials 0.000 claims description 13
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- 238000000992 sputter etching Methods 0.000 claims description 10
- HBVFXTAPOLSOPB-UHFFFAOYSA-N nickel vanadium Chemical compound [V].[Ni] HBVFXTAPOLSOPB-UHFFFAOYSA-N 0.000 claims description 7
- 238000000151 deposition Methods 0.000 claims description 5
- 239000013077 target material Substances 0.000 claims description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 4
- 239000007772 electrode material Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 229910000756 V alloy Inorganic materials 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 239000011651 chromium Substances 0.000 claims description 3
- 229920002678 cellulose Polymers 0.000 claims 1
- 239000001913 cellulose Substances 0.000 claims 1
- 239000003989 dielectric material Substances 0.000 claims 1
- 238000010304 firing Methods 0.000 claims 1
- 239000003985 ceramic capacitor Substances 0.000 description 12
- 238000000576 coating method Methods 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000005476 soldering Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 230000000873 masking effect Effects 0.000 description 3
- 230000002787 reinforcement Effects 0.000 description 3
- 230000003014 reinforcing effect Effects 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 230000002829 reductive effect Effects 0.000 description 2
- 229910001128 Sn alloy Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- ZYTHLJLPPSSDIP-UHFFFAOYSA-N anileridine dihydrochloride Chemical compound Cl.Cl.C1CC(C(=O)OCC)(C=2C=CC=CC=2)CCN1CCC1=CC=C(N)C=C1 ZYTHLJLPPSSDIP-UHFFFAOYSA-N 0.000 description 1
- 230000003466 anti-cipated effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002386 leaching Methods 0.000 description 1
- LQBJWKCYZGMFEV-UHFFFAOYSA-N lead tin Chemical compound [Sn].[Pb] LQBJWKCYZGMFEV-UHFFFAOYSA-N 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000003303 reheating Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- -1 sulfur ions Chemical class 0.000 description 1
- 235000012976 tarts Nutrition 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/228—Terminals
- H01G4/232—Terminals electrically connecting two or more layers of a stacked or rolled capacitor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/228—Terminals
- H01G4/232—Terminals electrically connecting two or more layers of a stacked or rolled capacitor
- H01G4/2325—Terminals electrically connecting two or more layers of a stacked or rolled capacitor characterised by the material of the terminals
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Ceramic Capacitors (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US30548881A | 1981-09-25 | 1981-09-25 | |
| US305488 | 1981-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5864017A true JPS5864017A (ja) | 1983-04-16 |
Family
ID=23181015
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57111413A Pending JPS5864017A (ja) | 1981-09-25 | 1982-06-28 | セラミツクコンデンサ−及びその製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPS5864017A (fr) |
| CA (1) | CA1180779A (fr) |
| DE (1) | DE3224959A1 (fr) |
| FR (1) | FR2513804B1 (fr) |
| GB (1) | GB2106714B (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04357807A (ja) * | 1991-06-04 | 1992-12-10 | Rohm Co Ltd | 多数個一体化積層セラミックコンデンサ |
| US5426560A (en) * | 1992-11-19 | 1995-06-20 | Murata Manufacturing Co., Ltd. | Electronic component |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4584629A (en) * | 1984-07-23 | 1986-04-22 | Avx Corporation | Method of making ceramic capacitor and resulting article |
| DE3517631A1 (de) * | 1984-11-07 | 1986-05-07 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum herstellen elektrischer plasmapolymerer vielschichtkondensatoren |
| FR2585174B1 (fr) * | 1985-07-16 | 1987-11-27 | Eurofarad | Procede de fabrication d'un composant capacitif multicouche a dielectrique ceramique du type cordierite, et composant ainsi obtenu |
| DE3638342A1 (de) * | 1986-11-10 | 1988-05-19 | Siemens Ag | Elektrisches bauelement aus keramik mit mehrlagenmetallisierung und verfahren zu seiner herstellung |
| DE3638286A1 (de) * | 1986-11-10 | 1988-05-11 | Siemens Ag | Elektrisches bauelement aus keramik mit mehrlagenmetallisierung und verfahren zu seiner herstellung |
| US4741077A (en) * | 1987-05-15 | 1988-05-03 | Sfe Technologies | End terminations for capacitors |
| DE3725454A1 (de) * | 1987-07-31 | 1989-02-09 | Siemens Ag | Elektrisches vielschichtbauelement mit einem gesinterten, monolithischen keramikkoerper und verfahren zur herstellung des elektrischen vielschichtbauelementes |
| DE3873206D1 (de) * | 1987-07-31 | 1992-09-03 | Siemens Ag | Fuellschichtbauteil mit einem gesinterten, monolithischen keramikkoerper und verfahren zu dessen herstellung. |
| US5565838A (en) * | 1992-05-28 | 1996-10-15 | Avx Corporation | Varistors with sputtered terminations |
| EP0572151A3 (fr) * | 1992-05-28 | 1995-01-18 | Avx Corp | Varistors avec des connexions vaporisées cathodiquement et méthode pour déposer des connexions vaporisées cathodiquement sur des varistors. |
| JP3494431B2 (ja) * | 1998-12-03 | 2004-02-09 | 株式会社村田製作所 | セラミック電子部品の製造方法およびセラミック電子部品 |
| US7208396B2 (en) * | 2002-01-16 | 2007-04-24 | Tegal Corporation | Permanent adherence of the back end of a wafer to an electrical component or sub-assembly |
| DE10317584B4 (de) * | 2003-04-16 | 2007-07-12 | Siemens Ag | Vorrichtung und Verfahren zum Herstellen einer Vorrichtung mit einem ersten Körper aus Stahl und einem Isolator |
| CN100516266C (zh) | 2003-10-07 | 2009-07-22 | 日矿金属株式会社 | 高纯度Ni-V合金、由该Ni-V合金形成的靶以及该Ni-V合金薄膜和高纯度Ni-V合金的制造方法 |
| SE527949C2 (sv) * | 2004-12-22 | 2006-07-18 | Abb Research Ltd | Metod att framställa en varistor |
| US8808513B2 (en) | 2008-03-25 | 2014-08-19 | Oem Group, Inc | Stress adjustment in reactive sputtering |
| US8482375B2 (en) | 2009-05-24 | 2013-07-09 | Oem Group, Inc. | Sputter deposition of cermet resistor films with low temperature coefficient of resistance |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5418062A (en) * | 1977-07-11 | 1979-02-09 | Murata Manufacturing Co | Method of making laminated capacitor |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE754574C (de) * | 1940-06-11 | 1953-01-19 | Lorenz C Ag | Stapelkondensator mit leicht zerbrechlichen dielektrischen Zwischenlagen |
| NL169260C (nl) * | 1971-04-16 | 1982-06-16 | Tam Ceramics Inc | Werkwijze om gesinterde keramische voorwerpen te vervaardigen, welke geleiders bevatten. |
| US4102021A (en) * | 1975-10-06 | 1978-07-25 | Matsushita Electric Industrial Co., Ltd. | Method for making capacitors with plated terminals |
-
1982
- 1982-04-26 CA CA000401648A patent/CA1180779A/fr not_active Expired
- 1982-05-06 GB GB08213035A patent/GB2106714B/en not_active Expired
- 1982-06-28 JP JP57111413A patent/JPS5864017A/ja active Pending
- 1982-07-03 DE DE19823224959 patent/DE3224959A1/de not_active Withdrawn
- 1982-07-15 FR FR8212393A patent/FR2513804B1/fr not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5418062A (en) * | 1977-07-11 | 1979-02-09 | Murata Manufacturing Co | Method of making laminated capacitor |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04357807A (ja) * | 1991-06-04 | 1992-12-10 | Rohm Co Ltd | 多数個一体化積層セラミックコンデンサ |
| US5426560A (en) * | 1992-11-19 | 1995-06-20 | Murata Manufacturing Co., Ltd. | Electronic component |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3224959A1 (de) | 1983-04-14 |
| FR2513804B1 (fr) | 1986-09-05 |
| FR2513804A1 (fr) | 1983-04-01 |
| CA1180779A (fr) | 1985-01-08 |
| GB2106714A (en) | 1983-04-13 |
| GB2106714B (en) | 1985-05-09 |
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