JPS585637A - 半導体チツプの形状検査装置 - Google Patents

半導体チツプの形状検査装置

Info

Publication number
JPS585637A
JPS585637A JP56102905A JP10290581A JPS585637A JP S585637 A JPS585637 A JP S585637A JP 56102905 A JP56102905 A JP 56102905A JP 10290581 A JP10290581 A JP 10290581A JP S585637 A JPS585637 A JP S585637A
Authority
JP
Japan
Prior art keywords
detection window
circuit
chip
detection
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56102905A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0325737B2 (OSRAM
Inventor
Masato Miyamura
宮村　正人
Masahito Nakajima
雅人 中島
Tetsuo Hizuka
哲男 肥塚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56102905A priority Critical patent/JPS585637A/ja
Publication of JPS585637A publication Critical patent/JPS585637A/ja
Publication of JPH0325737B2 publication Critical patent/JPH0325737B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP56102905A 1981-06-30 1981-06-30 半導体チツプの形状検査装置 Granted JPS585637A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56102905A JPS585637A (ja) 1981-06-30 1981-06-30 半導体チツプの形状検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56102905A JPS585637A (ja) 1981-06-30 1981-06-30 半導体チツプの形状検査装置

Publications (2)

Publication Number Publication Date
JPS585637A true JPS585637A (ja) 1983-01-13
JPH0325737B2 JPH0325737B2 (OSRAM) 1991-04-08

Family

ID=14339869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56102905A Granted JPS585637A (ja) 1981-06-30 1981-06-30 半導体チツプの形状検査装置

Country Status (1)

Country Link
JP (1) JPS585637A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0270532U (OSRAM) * 1988-11-18 1990-05-29
JP2009148323A (ja) * 2007-12-19 2009-07-09 Atsuko Kumagai 使い捨て鍋蓋カバー

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0270532U (OSRAM) * 1988-11-18 1990-05-29
JP2009148323A (ja) * 2007-12-19 2009-07-09 Atsuko Kumagai 使い捨て鍋蓋カバー

Also Published As

Publication number Publication date
JPH0325737B2 (OSRAM) 1991-04-08

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