JPS5854196B2 - アルミニウム電着装置 - Google Patents
アルミニウム電着装置Info
- Publication number
- JPS5854196B2 JPS5854196B2 JP51099570A JP9957076A JPS5854196B2 JP S5854196 B2 JPS5854196 B2 JP S5854196B2 JP 51099570 A JP51099570 A JP 51099570A JP 9957076 A JP9957076 A JP 9957076A JP S5854196 B2 JPS5854196 B2 JP S5854196B2
- Authority
- JP
- Japan
- Prior art keywords
- sluice
- electroplating
- inert gas
- opening
- holding device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title claims description 18
- 229910052782 aluminium Inorganic materials 0.000 title claims description 18
- 238000004070 electrodeposition Methods 0.000 title description 4
- 238000009713 electroplating Methods 0.000 claims description 36
- 239000011261 inert gas Substances 0.000 claims description 28
- 239000003792 electrolyte Substances 0.000 claims description 19
- 239000007788 liquid Substances 0.000 claims description 19
- 238000010992 reflux Methods 0.000 claims description 12
- 238000005507 spraying Methods 0.000 claims description 10
- 238000004140 cleaning Methods 0.000 claims description 9
- 238000011049 filling Methods 0.000 claims description 9
- 238000007789 sealing Methods 0.000 claims description 9
- 239000005486 organic electrolyte Substances 0.000 claims description 5
- 239000007921 spray Substances 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 3
- 239000001301 oxygen Substances 0.000 claims description 3
- 229910052760 oxygen Inorganic materials 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 230000008878 coupling Effects 0.000 description 7
- 238000010168 coupling process Methods 0.000 description 7
- 238000005859 coupling reaction Methods 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 3
- 238000011068 loading method Methods 0.000 description 3
- 238000012856 packing Methods 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000005662 Paraffin oil Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000002826 coolant Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000008151 electrolyte solution Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000007743 anodising Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000007717 exclusion Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/02—Tanks; Installations therefor
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/42—Electroplating: Baths therefor from solutions of light metals
- C25D3/44—Aluminium
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2537256A DE2537256C3 (de) | 1975-08-21 | 1975-08-21 | Vorrichtung zum galvanischen Abscheiden von Aluminium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5226324A JPS5226324A (en) | 1977-02-26 |
| JPS5854196B2 true JPS5854196B2 (ja) | 1983-12-03 |
Family
ID=5954521
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP51099570A Expired JPS5854196B2 (ja) | 1975-08-21 | 1976-08-20 | アルミニウム電着装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4053383A (enExample) |
| JP (1) | JPS5854196B2 (enExample) |
| AT (1) | AT343432B (enExample) |
| CH (1) | CH603831A5 (enExample) |
| DE (1) | DE2537256C3 (enExample) |
| GB (1) | GB1521418A (enExample) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2719641A1 (de) * | 1977-05-03 | 1978-11-09 | Montblanc Simplo Gmbh | Galvanisierbad zum abscheiden von metallen, z.b. aluminium in aprotischen loesungsmitteln und inerter atmosphaere |
| DE2719680A1 (de) * | 1977-05-03 | 1978-11-09 | Montblanc Simplo Gmbh | Anlage zum aluminieren |
| DE2901586A1 (de) * | 1979-01-17 | 1980-07-31 | Montblanc Simplo Gmbh | Aluminierzelle |
| DE3102021C2 (de) * | 1981-01-22 | 1984-02-23 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung zum galvanischen Abscheiden von Aluminium |
| DE3111786A1 (de) | 1981-03-25 | 1982-10-07 | Siemens AG, 1000 Berlin und 8000 München | Elektrisch isolierende schutzeinrichtung |
| DE3112919A1 (de) * | 1981-03-31 | 1982-10-07 | Siemens AG, 1000 Berlin und 8000 München | "metallbeschichtete eisenwerkstoffe" |
| DE3127390A1 (de) | 1981-07-10 | 1983-02-10 | Siemens AG, 1000 Berlin und 8000 München | Galvanisiereinrichtung |
| DE3150545A1 (de) * | 1981-07-10 | 1983-06-30 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum betreiben einer galvanisiereinrichtung |
| DE3138072C1 (de) * | 1981-09-24 | 1982-11-04 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum Aufheizen von Aluminierbaedern mit aprotischen Elektrolitsystemen |
| DE3231855A1 (de) * | 1982-08-26 | 1984-03-01 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung zum galvanischen abscheiden von aluminium |
| US4759831A (en) * | 1986-07-04 | 1988-07-26 | Siemens Aktiengesellschaft | Electroplating apparatus particularly for electro-deposition of aluminum |
| JP2530893B2 (ja) * | 1988-08-05 | 1996-09-04 | 日新製鋼株式会社 | 常温型溶融塩電気アルミニウムめっき装置及びその給電装置 |
| JPH06240499A (ja) * | 1993-02-12 | 1994-08-30 | Yamaha Corp | メッキ方法及びその装置 |
| JP4064132B2 (ja) * | 2002-03-18 | 2008-03-19 | 株式会社荏原製作所 | 基板処理装置及び基板処理方法 |
| US20070214620A1 (en) * | 2003-06-11 | 2007-09-20 | Mitsuru Miyazaki | Substrate processing apparatus and substrate processing method |
| ITBO20090326A1 (it) * | 2009-05-19 | 2010-11-20 | Cabro S P A | Dispositivo e metodo per l'elettrodeposizione di alluminio su substrati conduttori |
| FR2958300B1 (fr) * | 2010-03-31 | 2012-05-04 | Snecma | Dispositif pour controler des caracteristiques physiques d'un bain d'electrodeposition metallique. |
| CN102534738A (zh) * | 2010-12-21 | 2012-07-04 | 苏州市甘泉自动化环保设备厂 | 一种自动行车 |
| US9246024B2 (en) | 2011-07-14 | 2016-01-26 | International Business Machines Corporation | Photovoltaic device with aluminum plated back surface field and method of forming same |
| CN113802169B (zh) * | 2021-10-12 | 2023-06-20 | 合鸿新材科技有限公司 | 一种电镀设备 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1838666A (en) * | 1925-08-12 | 1931-12-29 | Colin G Fink | Electroplating apparatus |
| US2760930A (en) * | 1952-01-31 | 1956-08-28 | Nat Lead Co | Electrolytic cell of the diaphragm type |
| US2897129A (en) * | 1957-03-04 | 1959-07-28 | Titanium Metals Corp | Electrode handling and storing apparatus |
-
1975
- 1975-08-21 DE DE2537256A patent/DE2537256C3/de not_active Expired
-
1976
- 1976-07-27 CH CH956276A patent/CH603831A5/xx not_active IP Right Cessation
- 1976-07-29 AT AT558376A patent/AT343432B/de not_active IP Right Cessation
- 1976-08-12 GB GB33679/76A patent/GB1521418A/en not_active Expired
- 1976-08-12 US US05/713,983 patent/US4053383A/en not_active Expired - Lifetime
- 1976-08-20 JP JP51099570A patent/JPS5854196B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| ATA558376A (de) | 1977-09-15 |
| US4053383A (en) | 1977-10-11 |
| DE2537256C3 (de) | 1979-05-17 |
| AT343432B (de) | 1978-05-26 |
| GB1521418A (en) | 1978-08-16 |
| JPS5226324A (en) | 1977-02-26 |
| CH603831A5 (enExample) | 1978-08-31 |
| DE2537256A1 (de) | 1977-02-24 |
| DE2537256B2 (de) | 1978-09-21 |
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