JPS5852849A - 電子部品の配線製造方法 - Google Patents
電子部品の配線製造方法Info
- Publication number
- JPS5852849A JPS5852849A JP15096181A JP15096181A JPS5852849A JP S5852849 A JPS5852849 A JP S5852849A JP 15096181 A JP15096181 A JP 15096181A JP 15096181 A JP15096181 A JP 15096181A JP S5852849 A JPS5852849 A JP S5852849A
- Authority
- JP
- Japan
- Prior art keywords
- insulator
- metal film
- etching
- wiring
- photoresist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 238000005530 etching Methods 0.000 claims abstract description 25
- 239000002184 metal Substances 0.000 claims abstract description 25
- 238000000034 method Methods 0.000 claims abstract description 24
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 20
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 239000010408 film Substances 0.000 abstract description 31
- 239000004020 conductor Substances 0.000 abstract description 24
- 239000012212 insulator Substances 0.000 abstract description 23
- 239000004065 semiconductor Substances 0.000 abstract description 21
- 238000000206 photolithography Methods 0.000 abstract description 8
- 239000010409 thin film Substances 0.000 abstract description 7
- 238000010586 diagram Methods 0.000 abstract description 4
- 239000010410 layer Substances 0.000 description 34
- 238000000992 sputter etching Methods 0.000 description 5
- 238000000151 deposition Methods 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 101100045694 Caenorhabditis elegans art-1 gene Proteins 0.000 description 1
- 241000238631 Hexapoda Species 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000009956 embroidering Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15096181A JPS5852849A (ja) | 1981-09-24 | 1981-09-24 | 電子部品の配線製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15096181A JPS5852849A (ja) | 1981-09-24 | 1981-09-24 | 電子部品の配線製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5852849A true JPS5852849A (ja) | 1983-03-29 |
| JPS6341221B2 JPS6341221B2 (enExample) | 1988-08-16 |
Family
ID=15508212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15096181A Granted JPS5852849A (ja) | 1981-09-24 | 1981-09-24 | 電子部品の配線製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5852849A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6079743A (ja) * | 1983-10-05 | 1985-05-07 | Nec Corp | 半導体装置 |
| JPS63293859A (ja) * | 1987-05-27 | 1988-11-30 | Hitachi Ltd | 半導体装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56112734A (en) * | 1980-02-12 | 1981-09-05 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Formation of infinitesimal pattern |
-
1981
- 1981-09-24 JP JP15096181A patent/JPS5852849A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56112734A (en) * | 1980-02-12 | 1981-09-05 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Formation of infinitesimal pattern |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6079743A (ja) * | 1983-10-05 | 1985-05-07 | Nec Corp | 半導体装置 |
| JPS63293859A (ja) * | 1987-05-27 | 1988-11-30 | Hitachi Ltd | 半導体装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6341221B2 (enExample) | 1988-08-16 |
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