JPS5848908A - 表面誘電体層型半導体磁器組成物およびその製造方法 - Google Patents
表面誘電体層型半導体磁器組成物およびその製造方法Info
- Publication number
- JPS5848908A JPS5848908A JP56148646A JP14864681A JPS5848908A JP S5848908 A JPS5848908 A JP S5848908A JP 56148646 A JP56148646 A JP 56148646A JP 14864681 A JP14864681 A JP 14864681A JP S5848908 A JPS5848908 A JP S5848908A
- Authority
- JP
- Japan
- Prior art keywords
- component
- oxide
- amount
- dielectric layer
- type semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 31
- 239000000203 mixture Substances 0.000 title claims description 27
- 229910052573 porcelain Inorganic materials 0.000 title claims description 18
- 238000000034 method Methods 0.000 title description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 21
- 239000001301 oxygen Substances 0.000 claims description 21
- 239000000919 ceramic Substances 0.000 claims description 20
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 15
- 238000010438 heat treatment Methods 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 230000001590 oxidative effect Effects 0.000 claims description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 8
- PLDDOISOJJCEMH-UHFFFAOYSA-N neodymium(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Nd+3].[Nd+3] PLDDOISOJJCEMH-UHFFFAOYSA-N 0.000 claims description 8
- 229910052777 Praseodymium Inorganic materials 0.000 claims description 7
- 238000005245 sintering Methods 0.000 claims description 7
- 229910052779 Neodymium Inorganic materials 0.000 claims description 6
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052742 iron Inorganic materials 0.000 claims description 6
- 229910052693 Europium Inorganic materials 0.000 claims description 5
- 229910052688 Gadolinium Inorganic materials 0.000 claims description 5
- 229910052746 lanthanum Inorganic materials 0.000 claims description 5
- 229910052748 manganese Inorganic materials 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 229910052772 Samarium Inorganic materials 0.000 claims description 4
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 claims description 3
- 239000003989 dielectric material Substances 0.000 claims description 2
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 claims 4
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims 3
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 claims 2
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- 239000006104 solid solution Substances 0.000 description 25
- 239000010410 layer Substances 0.000 description 22
- 239000000843 powder Substances 0.000 description 21
- 230000015556 catabolic process Effects 0.000 description 16
- -1 rare earth titanate Chemical class 0.000 description 14
- 239000003990 capacitor Substances 0.000 description 12
- 230000007547 defect Effects 0.000 description 12
- 230000007935 neutral effect Effects 0.000 description 11
- 230000007423 decrease Effects 0.000 description 10
- 239000003985 ceramic capacitor Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 229910052684 Cerium Inorganic materials 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000010405 reoxidation reaction Methods 0.000 description 3
- 229910052692 Dysprosium Inorganic materials 0.000 description 2
- 241000209094 Oryza Species 0.000 description 2
- 235000007164 Oryza sativa Nutrition 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 235000009566 rice Nutrition 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- 101150097247 CRT1 gene Proteins 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 241000282326 Felis catus Species 0.000 description 1
- AFCARXCZXQIEQB-UHFFFAOYSA-N N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CCNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 AFCARXCZXQIEQB-UHFFFAOYSA-N 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 235000013339 cereals Nutrition 0.000 description 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- KTUFCUMIWABKDW-UHFFFAOYSA-N oxo(oxolanthaniooxy)lanthanum Chemical compound O=[La]O[La]=O KTUFCUMIWABKDW-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- FKTOIHSPIPYAPE-UHFFFAOYSA-N samarium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Sm+3].[Sm+3] FKTOIHSPIPYAPE-UHFFFAOYSA-N 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Ceramic Capacitors (AREA)
- Inorganic Insulating Materials (AREA)
- Compositions Of Oxide Ceramics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56148646A JPS5848908A (ja) | 1981-09-18 | 1981-09-18 | 表面誘電体層型半導体磁器組成物およびその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56148646A JPS5848908A (ja) | 1981-09-18 | 1981-09-18 | 表面誘電体層型半導体磁器組成物およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5848908A true JPS5848908A (ja) | 1983-03-23 |
| JPS6328492B2 JPS6328492B2 (enrdf_load_stackoverflow) | 1988-06-08 |
Family
ID=15457448
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56148646A Granted JPS5848908A (ja) | 1981-09-18 | 1981-09-18 | 表面誘電体層型半導体磁器組成物およびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5848908A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01236609A (ja) * | 1988-03-17 | 1989-09-21 | Matsushita Electric Ind Co Ltd | 還元再酸化型半導体コンデンサ用磁器組成物 |
| JPH01239704A (ja) * | 1988-03-18 | 1989-09-25 | Matsushita Electric Ind Co Ltd | 高誘電率磁器組成物 |
| US6911102B2 (en) * | 1999-08-09 | 2005-06-28 | Murata Manufacturing Co., Ltd. | Laminated type semiconductor ceramic element and production method for the laminated type semiconductor ceramic element |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0278186U (enrdf_load_stackoverflow) * | 1988-12-01 | 1990-06-15 |
-
1981
- 1981-09-18 JP JP56148646A patent/JPS5848908A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01236609A (ja) * | 1988-03-17 | 1989-09-21 | Matsushita Electric Ind Co Ltd | 還元再酸化型半導体コンデンサ用磁器組成物 |
| JPH01239704A (ja) * | 1988-03-18 | 1989-09-25 | Matsushita Electric Ind Co Ltd | 高誘電率磁器組成物 |
| US6911102B2 (en) * | 1999-08-09 | 2005-06-28 | Murata Manufacturing Co., Ltd. | Laminated type semiconductor ceramic element and production method for the laminated type semiconductor ceramic element |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6328492B2 (enrdf_load_stackoverflow) | 1988-06-08 |
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