JPS6328492B2 - - Google Patents
Info
- Publication number
- JPS6328492B2 JPS6328492B2 JP56148646A JP14864681A JPS6328492B2 JP S6328492 B2 JPS6328492 B2 JP S6328492B2 JP 56148646 A JP56148646 A JP 56148646A JP 14864681 A JP14864681 A JP 14864681A JP S6328492 B2 JPS6328492 B2 JP S6328492B2
- Authority
- JP
- Japan
- Prior art keywords
- mol
- oxide
- less
- component
- dielectric layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 31
- 239000000203 mixture Substances 0.000 claims description 29
- 229910052573 porcelain Inorganic materials 0.000 claims description 21
- 229910052760 oxygen Inorganic materials 0.000 claims description 20
- 239000001301 oxygen Substances 0.000 claims description 20
- 239000000843 powder Substances 0.000 claims description 20
- 239000000919 ceramic Substances 0.000 claims description 17
- 238000010438 heat treatment Methods 0.000 claims description 16
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 13
- 229910052684 Cerium Inorganic materials 0.000 claims description 9
- 230000001590 oxidative effect Effects 0.000 claims description 9
- 229910052746 lanthanum Inorganic materials 0.000 claims description 8
- 229910052748 manganese Inorganic materials 0.000 claims description 8
- PLDDOISOJJCEMH-UHFFFAOYSA-N neodymium(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Nd+3].[Nd+3] PLDDOISOJJCEMH-UHFFFAOYSA-N 0.000 claims description 8
- 229910052779 Neodymium Inorganic materials 0.000 claims description 7
- 229910052777 Praseodymium Inorganic materials 0.000 claims description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 7
- 229910052804 chromium Inorganic materials 0.000 claims description 7
- 229910052742 iron Inorganic materials 0.000 claims description 7
- 229910052759 nickel Inorganic materials 0.000 claims description 7
- 229910052772 Samarium Inorganic materials 0.000 claims description 6
- 229910052693 Europium Inorganic materials 0.000 claims description 5
- 229910052688 Gadolinium Inorganic materials 0.000 claims description 5
- 238000005245 sintering Methods 0.000 claims description 4
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 claims 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 3
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 claims 2
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- MMKQUGHLEMYQSG-UHFFFAOYSA-N oxygen(2-);praseodymium(3+) Chemical compound [O-2].[O-2].[O-2].[Pr+3].[Pr+3] MMKQUGHLEMYQSG-UHFFFAOYSA-N 0.000 claims 1
- 229910003447 praseodymium oxide Inorganic materials 0.000 claims 1
- 239000006104 solid solution Substances 0.000 description 26
- 239000010410 layer Substances 0.000 description 21
- 230000015556 catabolic process Effects 0.000 description 15
- -1 rare earth titanate Chemical class 0.000 description 14
- 239000003990 capacitor Substances 0.000 description 12
- 230000007547 defect Effects 0.000 description 12
- 230000007935 neutral effect Effects 0.000 description 10
- 230000007423 decrease Effects 0.000 description 8
- 239000003985 ceramic capacitor Substances 0.000 description 7
- 229910010413 TiO 2 Inorganic materials 0.000 description 6
- 238000009413 insulation Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 229910052692 Dysprosium Inorganic materials 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000010405 reoxidation reaction Methods 0.000 description 3
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 2
- 229910017493 Nd 2 O 3 Inorganic materials 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- IVMYJDGYRUAWML-UHFFFAOYSA-N cobalt(II) oxide Inorganic materials [Co]=O IVMYJDGYRUAWML-UHFFFAOYSA-N 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- GNRSAWUEBMWBQH-UHFFFAOYSA-N nickel(II) oxide Inorganic materials [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Ceramic Capacitors (AREA)
- Inorganic Insulating Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56148646A JPS5848908A (ja) | 1981-09-18 | 1981-09-18 | 表面誘電体層型半導体磁器組成物およびその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56148646A JPS5848908A (ja) | 1981-09-18 | 1981-09-18 | 表面誘電体層型半導体磁器組成物およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5848908A JPS5848908A (ja) | 1983-03-23 |
| JPS6328492B2 true JPS6328492B2 (enrdf_load_stackoverflow) | 1988-06-08 |
Family
ID=15457448
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56148646A Granted JPS5848908A (ja) | 1981-09-18 | 1981-09-18 | 表面誘電体層型半導体磁器組成物およびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5848908A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0278186U (enrdf_load_stackoverflow) * | 1988-12-01 | 1990-06-15 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01236609A (ja) * | 1988-03-17 | 1989-09-21 | Matsushita Electric Ind Co Ltd | 還元再酸化型半導体コンデンサ用磁器組成物 |
| JPH01239704A (ja) * | 1988-03-18 | 1989-09-25 | Matsushita Electric Ind Co Ltd | 高誘電率磁器組成物 |
| JP3506056B2 (ja) * | 1999-08-09 | 2004-03-15 | 株式会社村田製作所 | 正の抵抗温度特性を有する積層型半導体セラミック素子、および正の抵抗温度特性を有する積層型半導体セラミック素子の製造方法 |
-
1981
- 1981-09-18 JP JP56148646A patent/JPS5848908A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0278186U (enrdf_load_stackoverflow) * | 1988-12-01 | 1990-06-15 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5848908A (ja) | 1983-03-23 |
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