JPS5847860B2 - ハンドウタイソウチ - Google Patents

ハンドウタイソウチ

Info

Publication number
JPS5847860B2
JPS5847860B2 JP48073321A JP7332173A JPS5847860B2 JP S5847860 B2 JPS5847860 B2 JP S5847860B2 JP 48073321 A JP48073321 A JP 48073321A JP 7332173 A JP7332173 A JP 7332173A JP S5847860 B2 JPS5847860 B2 JP S5847860B2
Authority
JP
Japan
Prior art keywords
wiring
drain
source
silicide
channel transistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP48073321A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5023586A (enrdf_load_stackoverflow
Inventor
浩侑 丹呉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP48073321A priority Critical patent/JPS5847860B2/ja
Publication of JPS5023586A publication Critical patent/JPS5023586A/ja
Publication of JPS5847860B2 publication Critical patent/JPS5847860B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP48073321A 1973-06-30 1973-06-30 ハンドウタイソウチ Expired JPS5847860B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48073321A JPS5847860B2 (ja) 1973-06-30 1973-06-30 ハンドウタイソウチ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48073321A JPS5847860B2 (ja) 1973-06-30 1973-06-30 ハンドウタイソウチ

Publications (2)

Publication Number Publication Date
JPS5023586A JPS5023586A (enrdf_load_stackoverflow) 1975-03-13
JPS5847860B2 true JPS5847860B2 (ja) 1983-10-25

Family

ID=13514776

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48073321A Expired JPS5847860B2 (ja) 1973-06-30 1973-06-30 ハンドウタイソウチ

Country Status (1)

Country Link
JP (1) JPS5847860B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61166571A (ja) * 1985-01-18 1986-07-28 Konishiroku Photo Ind Co Ltd 現像装置

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5157169A (en) * 1974-11-14 1976-05-19 Oki Electric Ind Co Ltd Handotaisochino seizohoho
IT1110843B (it) * 1978-02-27 1986-01-06 Rca Corp Contatto affondato per dispositivi mos di tipo complementare
JPS5568675A (en) * 1978-11-17 1980-05-23 Toshiba Corp Fabrication of complementary mos transistor
JPS6156461A (ja) * 1984-08-28 1986-03-22 Nec Corp 絶縁層上のｍｉｓ型電界効果トランジスタ及びその製造方法
JPS6279617A (ja) * 1985-10-03 1987-04-13 Hitachi Ltd 半導体装置およびその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5015550A (enrdf_load_stackoverflow) * 1973-06-08 1975-02-19

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61166571A (ja) * 1985-01-18 1986-07-28 Konishiroku Photo Ind Co Ltd 現像装置

Also Published As

Publication number Publication date
JPS5023586A (enrdf_load_stackoverflow) 1975-03-13

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