JPS583243A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS583243A
JPS583243A JP10052581A JP10052581A JPS583243A JP S583243 A JPS583243 A JP S583243A JP 10052581 A JP10052581 A JP 10052581A JP 10052581 A JP10052581 A JP 10052581A JP S583243 A JPS583243 A JP S583243A
Authority
JP
Japan
Prior art keywords
plane
substrate
impurity region
film
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10052581A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0249020B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Yoshinobu Monma
門馬　義信
Toshihiko Fukuyama
福山　敏彦
Kengo Satou
健悟 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10052581A priority Critical patent/JPS583243A/ja
Publication of JPS583243A publication Critical patent/JPS583243A/ja
Publication of JPH0249020B2 publication Critical patent/JPH0249020B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/763—Polycrystalline semiconductor regions

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Element Separation (AREA)
  • Weting (AREA)
JP10052581A 1981-06-30 1981-06-30 半導体装置の製造方法 Granted JPS583243A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10052581A JPS583243A (ja) 1981-06-30 1981-06-30 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10052581A JPS583243A (ja) 1981-06-30 1981-06-30 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS583243A true JPS583243A (ja) 1983-01-10
JPH0249020B2 JPH0249020B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-10-26

Family

ID=14276369

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10052581A Granted JPS583243A (ja) 1981-06-30 1981-06-30 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS583243A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4679309A (en) * 1983-06-21 1987-07-14 Societe Pour L'etude Et La Fabrication De Circuits Integres Speciaux E.F.C.I.S. Process for manufacturing isolated semi conductor components in a semi conductor wafer
JP2006294716A (ja) * 2005-04-07 2006-10-26 Fuji Electric Device Technology Co Ltd 半導体装置およびその製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5366385A (en) * 1976-11-26 1978-06-13 Toshiba Corp Semiconductor intergrating circuit
JPS54121081A (en) * 1978-03-13 1979-09-19 Nec Corp Integrated circuit device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5366385A (en) * 1976-11-26 1978-06-13 Toshiba Corp Semiconductor intergrating circuit
JPS54121081A (en) * 1978-03-13 1979-09-19 Nec Corp Integrated circuit device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4679309A (en) * 1983-06-21 1987-07-14 Societe Pour L'etude Et La Fabrication De Circuits Integres Speciaux E.F.C.I.S. Process for manufacturing isolated semi conductor components in a semi conductor wafer
JP2006294716A (ja) * 2005-04-07 2006-10-26 Fuji Electric Device Technology Co Ltd 半導体装置およびその製造方法

Also Published As

Publication number Publication date
JPH0249020B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-10-26

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