JPS58207633A - 欠陥検査方法及びその装置 - Google Patents

欠陥検査方法及びその装置

Info

Publication number
JPS58207633A
JPS58207633A JP57090704A JP9070482A JPS58207633A JP S58207633 A JPS58207633 A JP S58207633A JP 57090704 A JP57090704 A JP 57090704A JP 9070482 A JP9070482 A JP 9070482A JP S58207633 A JPS58207633 A JP S58207633A
Authority
JP
Japan
Prior art keywords
circuit
pattern
sensors
logic
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57090704A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0134323B2 (enExample
Inventor
Kikuo Mita
三田　喜久夫
Moritoshi Ando
護俊 安藤
Giichi Kakigi
柿木　義一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP57090704A priority Critical patent/JPS58207633A/ja
Publication of JPS58207633A publication Critical patent/JPS58207633A/ja
Publication of JPH0134323B2 publication Critical patent/JPH0134323B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP57090704A 1982-05-28 1982-05-28 欠陥検査方法及びその装置 Granted JPS58207633A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57090704A JPS58207633A (ja) 1982-05-28 1982-05-28 欠陥検査方法及びその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57090704A JPS58207633A (ja) 1982-05-28 1982-05-28 欠陥検査方法及びその装置

Publications (2)

Publication Number Publication Date
JPS58207633A true JPS58207633A (ja) 1983-12-03
JPH0134323B2 JPH0134323B2 (enExample) 1989-07-19

Family

ID=14005911

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57090704A Granted JPS58207633A (ja) 1982-05-28 1982-05-28 欠陥検査方法及びその装置

Country Status (1)

Country Link
JP (1) JPS58207633A (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6256442A (ja) * 1985-09-05 1987-03-12 Sumikin Coke Co Ltd ナフタレンの精製方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6256442A (ja) * 1985-09-05 1987-03-12 Sumikin Coke Co Ltd ナフタレンの精製方法

Also Published As

Publication number Publication date
JPH0134323B2 (enExample) 1989-07-19

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