JPS58186950A - 薄膜半導体装置の製造方法 - Google Patents

薄膜半導体装置の製造方法

Info

Publication number
JPS58186950A
JPS58186950A JP57068845A JP6884582A JPS58186950A JP S58186950 A JPS58186950 A JP S58186950A JP 57068845 A JP57068845 A JP 57068845A JP 6884582 A JP6884582 A JP 6884582A JP S58186950 A JPS58186950 A JP S58186950A
Authority
JP
Japan
Prior art keywords
film
glass substrate
silicon film
thin film
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57068845A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0373149B2 (enrdf_load_stackoverflow
Inventor
Yasuhisa Oana
保久 小穴
Shusuke Kotake
小竹　秀典
Nobuo Mukai
向井　信夫
Kyozo Ide
井出　恭三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP57068845A priority Critical patent/JPS58186950A/ja
Publication of JPS58186950A publication Critical patent/JPS58186950A/ja
Publication of JPH0373149B2 publication Critical patent/JPH0373149B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/01—Manufacture or treatment

Landscapes

  • Recrystallisation Techniques (AREA)
JP57068845A 1982-04-26 1982-04-26 薄膜半導体装置の製造方法 Granted JPS58186950A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57068845A JPS58186950A (ja) 1982-04-26 1982-04-26 薄膜半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57068845A JPS58186950A (ja) 1982-04-26 1982-04-26 薄膜半導体装置の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP30328995A Division JPH08213324A (ja) 1995-10-30 1995-10-30 半導体装置

Publications (2)

Publication Number Publication Date
JPS58186950A true JPS58186950A (ja) 1983-11-01
JPH0373149B2 JPH0373149B2 (enrdf_load_stackoverflow) 1991-11-20

Family

ID=13385425

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57068845A Granted JPS58186950A (ja) 1982-04-26 1982-04-26 薄膜半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS58186950A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01196837A (ja) * 1988-02-02 1989-08-08 Fujitsu Ltd 半導体製造装置
JP2006245567A (ja) * 2005-03-03 2006-09-14 Sharp Corp 半導体装置の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56135968A (en) * 1980-03-27 1981-10-23 Canon Inc Amorphous silicon thin film transistor and manufacture thereof

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56135968A (en) * 1980-03-27 1981-10-23 Canon Inc Amorphous silicon thin film transistor and manufacture thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01196837A (ja) * 1988-02-02 1989-08-08 Fujitsu Ltd 半導体製造装置
JP2006245567A (ja) * 2005-03-03 2006-09-14 Sharp Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0373149B2 (enrdf_load_stackoverflow) 1991-11-20

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