JPS5816552A - 半導体素子用パッケ−ジ - Google Patents

半導体素子用パッケ−ジ

Info

Publication number
JPS5816552A
JPS5816552A JP56114724A JP11472481A JPS5816552A JP S5816552 A JPS5816552 A JP S5816552A JP 56114724 A JP56114724 A JP 56114724A JP 11472481 A JP11472481 A JP 11472481A JP S5816552 A JPS5816552 A JP S5816552A
Authority
JP
Japan
Prior art keywords
package
semiconductor element
layer
plating
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56114724A
Other languages
English (en)
Other versions
JPS6242386B2 (ja
Inventor
Mamoru Yanagisawa
柳沢　守
Hidehiko Akasaki
赤崎　英彦
Eiji Aoki
英二 青木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56114724A priority Critical patent/JPS5816552A/ja
Priority to US06/400,035 priority patent/US4458291A/en
Priority to EP82303884A priority patent/EP0071423B1/en
Priority to DE8282303884T priority patent/DE3278599D1/de
Priority to IE1757/82A priority patent/IE53953B1/en
Publication of JPS5816552A publication Critical patent/JPS5816552A/ja
Publication of JPS6242386B2 publication Critical patent/JPS6242386B2/ja
Granted legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49822—Multilayer substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/02—Containers; Seals
    • H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
    • H01L23/053—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body
    • H01L23/055—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body the leads having a passage through the base
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
    • H01L23/60—Protection against electrostatic charges or discharges, e.g. Faraday shields
    • H—ELECTRICITY
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    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144—Gold (Au) as principal constituent
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    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
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    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • H—ELECTRICITY
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    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • H—ELECTRICITY
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01078—Platinum [Pt]
    • H—ELECTRICITY
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    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01079—Gold [Au]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/1515—Shape
    • H01L2924/15153—Shape the die mounting substrate comprising a recess for hosting the device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/1517—Multilayer substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/153—Connection portion
    • H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15312—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a pin array, e.g. PGA
    • H—ELECTRICITY
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    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/156—Material
    • H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
    • H01L2924/15787—Ceramics, e.g. crystalline carbides, nitrides or oxides
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    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161—Cap
    • H01L2924/1615—Shape
    • H01L2924/16195—Flat cap [not enclosing an internal cavity]

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Wire Bonding (AREA)
  • Lead Frames For Integrated Circuits (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【発明の詳細な説明】 本発明は、半導体素子を収容するセラ之ツクＡ＝ッケー
ジに関する。
半導体素子特にＬＳＩなどの多数の端子を持つ素子のパ
ッケージには第１図に示すように１多層セラミック板を
利用したものがある。この図で１０はＬＳＩチップ、２
０は骸チップを搭載、収容するパッケージである。パッ
ケージ２０の本体部は厚みα５−程度のグリーンシート
にタングステン（Ｗ）ベーメトで所要の配線を施した亀
のを所要枚数例えば４〜６枚程度重ね、圧着して例えば
１５００〜１６００℃の高温で焼結したもので、２１．
２２・・−・・２５はその各層を示す０本例では層２１
に半導体チップ１０を取付社るステージパターン２１ｍ
が設けられ１層２４にインナーパターン２４ｍが−とて
最上部の層２５にはシールパターン２５ｍが般社られる
。これらの各パターンの平面形状を第５図に示す、この
８５図に示すようにステージパターン２１ｍは正方形又
は矩形であって、半導体チップ１０よりや−大きい寸法
を持つ、インナーパターン２４ｍは多数放射状に並ぶ（
図面では一部のみ示す）ポンディングパッド部であって
、半導体チップ１０の外部端子数だ妙あり、該外部端子
とはワイヤ１２により接続される。シールパターン２５
ｍはインナーパターン２４ｍを囲む角環状体で、ステー
ジパターンに半導体チップが取付けられ１インナーノゝ
ターンにワイヤボンディングがなされた後でキャップ１
４が取付けられる。
パッケージ２０の最下部の層２５には端子ビン１６が取
付けられ、これらの端子ビンはインナーパターンの各々
に、パッケージ２０の各層の配線および各層を貫通する
スルーホール部の配線（点線３０で示す）を通して接続
される。この端子ピン１６の側面図を第６図に、平面図
を第７図に示す。端子ビン１６は全て同じ短棒状である
が、四隅にあるピンのみ突出部１４ｍを持ち、これはプ
リント板に本パッケージの端子ビンを挿込んだときのス
トッパとなる。第７図に示されるように端子ビンは複数
列配設され、インナーパターン２４ｍの各エレメントの
個数以上ある。
パッケージ２００灸層の配線はインナーパターン２４１
と端子ビン１６とを結ぶものであるが、それ以外にメッ
キ用の導線となる。即ちステージパターン２１ｍおよび
インナーパターン２４ａなどは露出藺、は圧着による接
続を可能とするため金（ムＵ）層とするが、セラミック
の焼結温度が高くて耐えられないので、グリ゛−ンシー
）Ｋ施す電極配線パターンはタングステンペーストによ
るものとし、か＼る状態で焼結し、その後金メッキする
。
詳しくはに一’２図に示すようにセラミック基板上タン
グステン層３２にニッケル（Ｎ　ｓ　）層３４を電解メ
ッキし、その上に金（ムＵ）層３６を電解メッキする。
電解メッキに際しては電圧を加える必要があるが、この
電圧印加はピン１６へ至る配線を分岐してパッケージ２
０の側面へ出るようＫＬ、該側面に導電層３８を設け、
この導電層３８に電圧を加えて行なう。メッキが済めば
導電層３８は不要であシ、シかもこの導電層がありたの
では全端子ピンが短絡されるから、研磨によシ除去する
。従って研磨後は第３図に示すようにパッケージ側面に
メッキ用導線の切断面５０ａが露出しており、これが本
例の如きＲＩ’ｌ’パッケージの特徴である。
導電層３８の除去はメッキ後に行ない、半導体素子搭載
はその後である。またメッキし、導電層３８を除去した
パッケージは、パッケージとしては完成品であ如、従っ
てユーザへの販売対象にもなる。か＼るパッケージへ半
導体素子を搭載し、ワイヤボンディングを行ない、キャ
ップを取付けて半導体装置として完成する際、作業者は
該パッケージを手で持りて移動し、所定箇所へ設置しと
いった操作を必然的に行なうととｋなるが、その際多く
の者はパッケージの両側部を抑えて持つ。
この際、該両側部には導線切断面が露出しており、そし
て周知のように人体は静電気を持っているから、ステー
ジパターンに半導体・素子が搭載され、インナーパター
ンにワイヤボンディングがなされた後であると、半導体
素子に該静電気による高電圧が印加されて半導体素子が
絶縁破壊される恐れがある。
本発明はか＼る点を改善しようとするものであって、特
徴とするところは側面に導線の切断面が露出する半導体
素子用パッケージにおいて、核切断面が側面中央部に来
るように導線を配置し、そして該側面中央部を側面両端
縁よシ凹ませ九ことにある。第４図にその実施例を示す
。
メッキ後は導電層３８を研削して除去するが本発明では
該研削を更に進めてパッケージ側面を（１）図のように
三角状に、または（ｂ）図の如く溝状に１あるいは（＠
）図の如く弧状にくほませる。またメッキ用導線°はパ
ッケージ側面の両端縁２０ｍ、２０ｂを外して中間部に
集まシ、切断面３０ｍはくほんだ該中間部＃／ｃあるよ
うＫする。このようＫすればパッケージ両側面を手で抑
えて持っても切断面３０ａＫ手が触れることはなく、ひ
いては半導体素子が静電気による高電圧で絶縁破壊され
ることはない。
凹部の形状は適宜のものであってよいが第４図（＆）　
、　（ｃ）のように端縁２０ｍ、２０ｂが尖鋭であると
取扱い中に欠ける恐れがあり、この点では第４図（ｂ）
の形状が好ましい。凹部の深さは、手で持ったとき手が
切断面３０ａＫ触れない程度であるから数置以下の微小
なものでよい、第６図は第４図（ｂ）の形状の凹部とし
たパッケージ側面を示す。切断面３０ｍは一部のみ説明
的に示す。
以上説明したように本発明によれば導線切断面が露出し
ている半導体素子セラミックパッケージの側面を、その
導電層を切除する際の研削を側面中間部においてや＼深
く行ない、骸中間部にメッキ用導線が集まるようにして
おくという簡単な手段によシ、取扱い中の半導体素子の
絶縁破壊を回避することができ、絶縁被徨を施すなどの
付加手段を要し工程を増す方式に比べてコスト的、汚染
回避、その他の面で有利である。
【図面の簡単な説明】
第１図はセラミックパッケージの構造を示す断面図、第
２図はインナーパターン部などの断面構造を示す図、第
３図は主としてメッキ用導線部を示す断面図、第４図は
本発明の実施例を示す部分断面−図、第５図はセラミッ
クパッケージの平面図、第６図は同側面図、第７図は同
底面図である。 図面で５０ｍは導Ｊ！切断面、１０は半導体素子、２０
はパッケージ、２０　ｍ　−２０ｂはパッケージの両端
縁である。 出願人　富士通株式会社 代理人弁理士　　　青　　　柳　　　　　　稔第１図 第２図　　　　第３図 ６ 第４図 第５図

Claims (1)

    【特許請求の範囲】
  1. 側面に導線の切断面が露出する半導体素子用パッケージ
    において、峡切断面が側面中央部に来るように導線を配
    置し、セして該側−中央部を側面両端縁より凹ませたこ
    とを特徴とする半導体素子用パッケージ。
JP56114724A 1981-07-22 1981-07-22 半導体素子用パッケ−ジ Granted JPS5816552A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP56114724A JPS5816552A (ja) 1981-07-22 1981-07-22 半導体素子用パッケ−ジ
US06/400,035 US4458291A (en) 1981-07-22 1982-07-20 Package for enclosing semiconductor elements
EP82303884A EP0071423B1 (en) 1981-07-22 1982-07-22 Packages for enclosing semiconductor elements
DE8282303884T DE3278599D1 (en) 1981-07-22 1982-07-22 Packages for enclosing semiconductor elements
IE1757/82A IE53953B1 (en) 1981-07-22 1982-07-22 Packages for enclosing semiconductor elements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56114724A JPS5816552A (ja) 1981-07-22 1981-07-22 半導体素子用パッケ−ジ

Publications (2)

Publication Number Publication Date
JPS5816552A true JPS5816552A (ja) 1983-01-31
JPS6242386B2 JPS6242386B2 (ja) 1987-09-08

Family

ID=14645029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56114724A Granted JPS5816552A (ja) 1981-07-22 1981-07-22 半導体素子用パッケ−ジ

Country Status (5)

Country Link
US (1) US4458291A (ja)
EP (1) EP0071423B1 (ja)
JP (1) JPS5816552A (ja)
DE (1) DE3278599D1 (ja)
IE (1) IE53953B1 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6260184A (ja) * 1985-09-11 1987-03-16 Fujitsu Ltd 磁気バブルデバイス
JPS62214648A (ja) * 1986-03-15 1987-09-21 Ngk Insulators Ltd 半導体素子用パツケ−ジの製造方法
US7095102B2 (en) 2001-11-07 2006-08-22 Kabushiki Kaisha Toshiba Pad rearrangement substrate
WO2012057286A1 (ja) * 2010-10-27 2012-05-03 京セラ株式会社 配線基板
JP2015230902A (ja) * 2014-06-03 2015-12-21 日本特殊陶業株式会社 配線基板

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CA1197627A (en) * 1983-02-18 1985-12-03 William S. Phy Device enclosure for high density tape bonding
JPS59180514A (ja) * 1983-03-31 1984-10-13 Toshiba Corp 光受信モジユ−ル
US4513355A (en) * 1983-06-15 1985-04-23 Motorola, Inc. Metallization and bonding means and method for VLSI packages
JPS60234290A (ja) * 1984-05-07 1985-11-20 Fujitsu Ltd 磁気バブルメモリモジユ−ル
US4626958A (en) * 1985-01-22 1986-12-02 Rogers Corporation Decoupling capacitor for Pin Grid Array package
FR2576448B1 (fr) * 1985-01-22 1989-04-14 Rogers Corp Condensateur de decouplage pour assemblage avec disposition a grille de broches
US4658327A (en) * 1985-01-22 1987-04-14 Rogers Corporation Decoupling capacitor for surface mounted chip carrier
JPH0331046Y2 (ja) * 1985-03-01 1991-07-01
US4748495A (en) * 1985-08-08 1988-05-31 Dypax Systems Corporation High density multi-chip interconnection and cooling package
US4677520A (en) * 1985-09-13 1987-06-30 James Price Static charge protector for integrated circuits
GB2209867B (en) * 1987-09-16 1990-12-19 Advanced Semiconductor Package Method of forming an integrated circuit chip carrier
US5251372A (en) * 1988-08-03 1993-10-12 Houghton Jon C Method and apparatus for framing a film mounted integrated circuit
US4914813A (en) * 1988-11-25 1990-04-10 Innovative Packing Technology Refurbishing of prior used laminated ceramic packages
US5041396A (en) * 1989-07-18 1991-08-20 Vlsi Technology, Inc. Reusable package for holding a semiconductor chip and method for reusing the package
US5045639A (en) * 1990-08-21 1991-09-03 Tong Hsing Electronic Industries Ltd. Pin grid array package
US5567169A (en) * 1990-09-27 1996-10-22 The Whitaker Corporation Electrostatic discharge conductor to shell continuity
US5567168A (en) * 1990-09-27 1996-10-22 The Whitaker Corporation Electrical connector having electrostatic discharge protection
US5219294A (en) * 1991-02-20 1993-06-15 Amp Incorporated Electrical docking connector
US5469963A (en) * 1992-04-08 1995-11-28 Asyst Technologies, Inc. Sealable transportable container having improved liner
JP3260941B2 (ja) * 1993-06-18 2002-02-25 株式会社日立製作所 多層配線基板および多層配線基板の製造方法
US5835254A (en) * 1995-09-06 1998-11-10 Eastman Kodak Company Mounting assembly for modulators
US5674083A (en) * 1995-11-22 1997-10-07 The Whitaker Corporation ESD protected electrical connector
US6000955A (en) * 1997-12-10 1999-12-14 Gabriel Technologies, Inc. Multiple terminal edge connector
JP2003258141A (ja) * 2002-02-27 2003-09-12 Nec Compound Semiconductor Devices Ltd 電子部品及びその製造方法
KR100475079B1 (ko) * 2002-06-12 2005-03-10 삼성전자주식회사 고전압용 ｂｇａ 패키지와 그에 사용되는 히트 스프레더및 제조방법
US9022950B2 (en) 2012-05-30 2015-05-05 Magnolia Medical Technologies, Inc. Fluid diversion mechanism for bodily-fluid sampling

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US3345541A (en) * 1966-02-21 1967-10-03 Amp Inc Mounting and connecting means for circuit devices
US3601522A (en) * 1970-06-18 1971-08-24 American Lava Corp Composite ceramic package breakaway notch
GB1515160A (en) * 1975-11-28 1978-06-21 Plessey Co Ltd Electrically integrated circuit package protectors
US4327832A (en) * 1980-06-26 1982-05-04 Thielex Plastics Corporation Container for packaging semiconductor components

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6260184A (ja) * 1985-09-11 1987-03-16 Fujitsu Ltd 磁気バブルデバイス
JPS62214648A (ja) * 1986-03-15 1987-09-21 Ngk Insulators Ltd 半導体素子用パツケ−ジの製造方法
JPH0459778B2 (ja) * 1986-03-15 1992-09-24 Ngk Insulators Ltd
US7095102B2 (en) 2001-11-07 2006-08-22 Kabushiki Kaisha Toshiba Pad rearrangement substrate
US7253509B2 (en) 2001-11-07 2007-08-07 Kabushiki Kaisha Toshiba Semiconductor device, electronic card and pad rearrangement substrate
US7268424B2 (en) 2001-11-07 2007-09-11 Kabushiki Kaisha Toshiba Semiconductor device, electronic card and pad rearrangement substrate
US7719106B2 (en) 2001-11-07 2010-05-18 Kabushiki Kaisha Toshiba Semiconductor device, electronic card and pad rearrangement substrate
WO2012057286A1 (ja) * 2010-10-27 2012-05-03 京セラ株式会社 配線基板
JP5678085B2 (ja) * 2010-10-27 2015-02-25 京セラ株式会社 配線基板、電子装置および多数個取り配線基板
US9485867B2 (en) 2010-10-27 2016-11-01 Kyocera Corporation Wiring board
JP2015230902A (ja) * 2014-06-03 2015-12-21 日本特殊陶業株式会社 配線基板

Also Published As

Publication number Publication date
EP0071423A3 (en) 1985-01-09
IE53953B1 (en) 1989-04-26
EP0071423A2 (en) 1983-02-09
US4458291A (en) 1984-07-03
JPS6242386B2 (ja) 1987-09-08
IE821757L (en) 1983-01-22
EP0071423B1 (en) 1988-06-01
DE3278599D1 (en) 1988-07-07

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