JPS58153375A - 半導体素子の製造方法 - Google Patents

半導体素子の製造方法

Info

Publication number
JPS58153375A
JPS58153375A JP57035042A JP3504282A JPS58153375A JP S58153375 A JPS58153375 A JP S58153375A JP 57035042 A JP57035042 A JP 57035042A JP 3504282 A JP3504282 A JP 3504282A JP S58153375 A JPS58153375 A JP S58153375A
Authority
JP
Japan
Prior art keywords
metal
resist pattern
electrode
source
insulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57035042A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6262071B2 (OSRAM
Inventor
Yoshiaki Sano
佐野　芳明
Toshio Nonaka
野中　敏夫
Toshimasa Ishida
俊正 石田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP57035042A priority Critical patent/JPS58153375A/ja
Publication of JPS58153375A publication Critical patent/JPS58153375A/ja
Publication of JPS6262071B2 publication Critical patent/JPS6262071B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10D64/011—

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)
JP57035042A 1982-03-08 1982-03-08 半導体素子の製造方法 Granted JPS58153375A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57035042A JPS58153375A (ja) 1982-03-08 1982-03-08 半導体素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57035042A JPS58153375A (ja) 1982-03-08 1982-03-08 半導体素子の製造方法

Publications (2)

Publication Number Publication Date
JPS58153375A true JPS58153375A (ja) 1983-09-12
JPS6262071B2 JPS6262071B2 (OSRAM) 1987-12-24

Family

ID=12430978

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57035042A Granted JPS58153375A (ja) 1982-03-08 1982-03-08 半導体素子の製造方法

Country Status (1)

Country Link
JP (1) JPS58153375A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01133375A (ja) * 1987-09-23 1989-05-25 Siemens Ag 自己整合ゲートを備えるｍｅｓｆｅｔの製造方法
US6627496B1 (en) 1998-08-13 2003-09-30 Infineon Technologies Ag Process for producing structured layers, process for producing components of an integrated circuit, and process for producing a memory configuration

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55105326A (en) * 1979-02-07 1980-08-12 Matsushita Electronics Corp Manufacturing method of electrode of semiconductor device
JPS5623783A (en) * 1979-08-01 1981-03-06 Matsushita Electronics Corp Formation of electrode for semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55105326A (en) * 1979-02-07 1980-08-12 Matsushita Electronics Corp Manufacturing method of electrode of semiconductor device
JPS5623783A (en) * 1979-08-01 1981-03-06 Matsushita Electronics Corp Formation of electrode for semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01133375A (ja) * 1987-09-23 1989-05-25 Siemens Ag 自己整合ゲートを備えるｍｅｓｆｅｔの製造方法
US6627496B1 (en) 1998-08-13 2003-09-30 Infineon Technologies Ag Process for producing structured layers, process for producing components of an integrated circuit, and process for producing a memory configuration

Also Published As

Publication number Publication date
JPS6262071B2 (OSRAM) 1987-12-24

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