JPS58138334U - ウエハ自動給材機構 - Google Patents

ウエハ自動給材機構

Info

Publication number
JPS58138334U
JPS58138334U JP3469082U JP3469082U JPS58138334U JP S58138334 U JPS58138334 U JP S58138334U JP 3469082 U JP3469082 U JP 3469082U JP 3469082 U JP3469082 U JP 3469082U JP S58138334 U JPS58138334 U JP S58138334U
Authority
JP
Japan
Prior art keywords
material feeding
wafer
feeding mechanism
automatic material
low pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3469082U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0110927Y2 (enrdf_load_stackoverflow
Inventor
石井　英夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3469082U priority Critical patent/JPS58138334U/ja
Publication of JPS58138334U publication Critical patent/JPS58138334U/ja
Application granted granted Critical
Publication of JPH0110927Y2 publication Critical patent/JPH0110927Y2/ja
Granted legal-status Critical Current

Links

JP3469082U 1982-03-12 1982-03-12 ウエハ自動給材機構 Granted JPS58138334U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3469082U JPS58138334U (ja) 1982-03-12 1982-03-12 ウエハ自動給材機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3469082U JPS58138334U (ja) 1982-03-12 1982-03-12 ウエハ自動給材機構

Publications (2)

Publication Number Publication Date
JPS58138334U true JPS58138334U (ja) 1983-09-17
JPH0110927Y2 JPH0110927Y2 (enrdf_load_stackoverflow) 1989-03-29

Family

ID=30046179

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3469082U Granted JPS58138334U (ja) 1982-03-12 1982-03-12 ウエハ自動給材機構

Country Status (1)

Country Link
JP (1) JPS58138334U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61150320A (ja) * 1984-12-25 1986-07-09 Fujitsu Ltd 縦型炉
JPS61121734U (enrdf_load_stackoverflow) * 1985-01-18 1986-07-31

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61150320A (ja) * 1984-12-25 1986-07-09 Fujitsu Ltd 縦型炉
JPS61121734U (enrdf_load_stackoverflow) * 1985-01-18 1986-07-31

Also Published As

Publication number Publication date
JPH0110927Y2 (enrdf_load_stackoverflow) 1989-03-29

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