JPS58138334U - Wafer automatic material feeding mechanism - Google Patents

Wafer automatic material feeding mechanism

Info

Publication number
JPS58138334U
JPS58138334U JP3469082U JP3469082U JPS58138334U JP S58138334 U JPS58138334 U JP S58138334U JP 3469082 U JP3469082 U JP 3469082U JP 3469082 U JP3469082 U JP 3469082U JP S58138334 U JPS58138334 U JP S58138334U
Authority
JP
Japan
Prior art keywords
material feeding
wafer
feeding mechanism
automatic material
low pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3469082U
Other languages
Japanese (ja)
Other versions
JPH0110927Y2 (en
Inventor
石井　英夫
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP3469082U priority Critical patent/JPS58138334U/en
Publication of JPS58138334U publication Critical patent/JPS58138334U/en
Application granted granted Critical
Publication of JPH0110927Y2 publication Critical patent/JPH0110927Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来の減圧ＣＶＤ装置を示す図である。。 第２図は本考案の一実施例である減圧ＣＶＤ装置のウェ
ハ自動給材機構を説明するための図である。 図において １１は反応管、１２は排気口、１３はガス導入口、１４
はエンドキャップ、１５は加熱ヒータ、１６はウェハ、
１７はウェハホルダ、１８はリフト、１９．２０はカセ
ットキャリア、２１はコン　　−ベアを示す。FIG. 1 is a diagram showing a conventional low pressure CVD apparatus. . FIG. 2 is a diagram for explaining an automatic wafer material feeding mechanism of a low pressure CVD apparatus which is an embodiment of the present invention. In the figure, 11 is a reaction tube, 12 is an exhaust port, 13 is a gas inlet port, and 14
is an end cap, 15 is a heater, 16 is a wafer,
17 is a wafer holder, 18 is a lift, 19.20 is a cassette carrier, and 21 is a conveyor.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ウェハ上にシリコン膜又はシリコン窒化膜等の絶縁被膜
を形成させる減圧ＣＶＤ装置のウェハ給材機構であって
、予めカセットキャリヤに収容した複数の該ウェハをウ
ェハホルダーに積みかえ、該ホルダーは上下に移動する
リフト機構と、回転′　機構を備えた前記減圧ＣＶＤ装
置のエンドキャップに自動的に配設されてなることを特
徴とするウェハ自動給材機構。　　・A wafer supply mechanism for a low pressure CVD apparatus that forms an insulating film such as a silicon film or a silicon nitride film on a wafer, in which a plurality of wafers stored in a cassette carrier in advance are stacked on a wafer holder, and the holder is placed vertically. An automatic wafer material feeding mechanism characterized in that the automatic wafer material feeding mechanism is automatically disposed on the end cap of the low pressure CVD apparatus, which is equipped with a moving lift mechanism and a rotation mechanism.・
JP3469082U 1982-03-12 1982-03-12 Wafer automatic material feeding mechanism Granted JPS58138334U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3469082U JPS58138334U (en) 1982-03-12 1982-03-12 Wafer automatic material feeding mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3469082U JPS58138334U (en) 1982-03-12 1982-03-12 Wafer automatic material feeding mechanism

Publications (2)

Publication Number Publication Date
JPS58138334U true JPS58138334U (en) 1983-09-17
JPH0110927Y2 JPH0110927Y2 (en) 1989-03-29

Family

ID=30046179

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3469082U Granted JPS58138334U (en) 1982-03-12 1982-03-12 Wafer automatic material feeding mechanism

Country Status (1)

Country Link
JP (1) JPS58138334U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61150320A (en) * 1984-12-25 1986-07-09 Fujitsu Ltd Vertical furnace
JPS61121734U (en) * 1985-01-18 1986-07-31

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61150320A (en) * 1984-12-25 1986-07-09 Fujitsu Ltd Vertical furnace
JPS61121734U (en) * 1985-01-18 1986-07-31

Also Published As

Publication number Publication date
JPH0110927Y2 (en) 1989-03-29

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