JPS58136701A - 微粒子のコーティング方法 - Google Patents

微粒子のコーティング方法

Info

Publication number
JPS58136701A
JPS58136701A JP57017577A JP1757782A JPS58136701A JP S58136701 A JPS58136701 A JP S58136701A JP 57017577 A JP57017577 A JP 57017577A JP 1757782 A JP1757782 A JP 1757782A JP S58136701 A JPS58136701 A JP S58136701A
Authority
JP
Japan
Prior art keywords
fine particles
plasma
container
particles
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57017577A
Other languages
English (en)
Japanese (ja)
Other versions
JPH024642B2 (enExample
Inventor
Kenji Yanagihara
健児 柳原
Mitsuo Kimura
光夫 木村
Kozo Arai
新井　洸三
Teizo Kotani
小谷　悌三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
JSR Corp
Original Assignee
Nippon Synthetic Chemical Industry Co Ltd
Japan Synthetic Rubber Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Synthetic Chemical Industry Co Ltd, Japan Synthetic Rubber Co Ltd filed Critical Nippon Synthetic Chemical Industry Co Ltd
Priority to JP57017577A priority Critical patent/JPS58136701A/ja
Publication of JPS58136701A publication Critical patent/JPS58136701A/ja
Publication of JPH024642B2 publication Critical patent/JPH024642B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/14—Treatment of metallic powder

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Powder Metallurgy (AREA)
JP57017577A 1982-02-08 1982-02-08 微粒子のコーティング方法 Granted JPS58136701A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57017577A JPS58136701A (ja) 1982-02-08 1982-02-08 微粒子のコーティング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57017577A JPS58136701A (ja) 1982-02-08 1982-02-08 微粒子のコーティング方法

Publications (2)

Publication Number Publication Date
JPS58136701A true JPS58136701A (ja) 1983-08-13
JPH024642B2 JPH024642B2 (enExample) 1990-01-30

Family

ID=11947760

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57017577A Granted JPS58136701A (ja) 1982-02-08 1982-02-08 微粒子のコーティング方法

Country Status (1)

Country Link
JP (1) JPS58136701A (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0192373A (ja) * 1987-09-30 1989-04-11 Ishikawajima Harima Heavy Ind Co Ltd 比表面積の大きい原料へのｃｖｄによるカーボン薄膜製造方法
JP2002060943A (ja) * 2000-08-22 2002-02-28 Tohoku Electric Power Co Inc 高純度シリコンの被覆方法及び装置
JP2008169421A (ja) * 2007-01-10 2008-07-24 Tsubaki Emerson Co Ｄｌｃ成膜装置
JP2009256804A (ja) * 2009-08-03 2009-11-05 Utec:Kk 微粒子
JP2017075391A (ja) * 2015-08-31 2017-04-20 ウルトラテック インク 回転反応管を有するプラズマ助長原子層堆積システム
EP3484810A4 (en) * 2016-07-15 2020-03-25 Oned Material LLC METHOD AND DEVICE FOR PRODUCING SILICON NANO WIRE ON CARBON-BASED POWDER FOR USE IN BATTERIES
JP2020084222A (ja) * 2018-11-16 2020-06-04 日本化学工業株式会社 被覆粒子の製造方法

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4918751A (enExample) * 1972-05-31 1974-02-19
JPS4944868A (enExample) * 1972-09-04 1974-04-27
JPS5236759A (en) * 1975-09-18 1977-03-22 Oki Electric Ind Co Ltd Method of fixing parts on printed circuit board
JPS5641375A (en) * 1979-09-13 1981-04-18 Matsushita Electric Ind Co Ltd Sputtering apparatus
JPS5645962A (en) * 1979-09-25 1981-04-25 Nippon Tokushu Toryo Kk Asphaltic coating-type vibration-damping material
JPS57166373A (en) * 1981-04-02 1982-10-13 Sumitomo Electric Industries Manufacture of non-oxide ceramics
JPS5822302A (ja) * 1981-07-30 1983-02-09 Nippon Steel Corp 水素吸蔵金属の活性化処理方法
JPS5881971A (ja) * 1981-11-11 1983-05-17 Matsushita Electric Ind Co Ltd 着膜装置
JPS58100601A (ja) * 1981-12-09 1983-06-15 Japan Synthetic Rubber Co Ltd 被覆超微粒子またはその膜並びに形成方法及び装置

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4918751A (enExample) * 1972-05-31 1974-02-19
JPS4944868A (enExample) * 1972-09-04 1974-04-27
JPS5236759A (en) * 1975-09-18 1977-03-22 Oki Electric Ind Co Ltd Method of fixing parts on printed circuit board
JPS5641375A (en) * 1979-09-13 1981-04-18 Matsushita Electric Ind Co Ltd Sputtering apparatus
JPS5645962A (en) * 1979-09-25 1981-04-25 Nippon Tokushu Toryo Kk Asphaltic coating-type vibration-damping material
JPS57166373A (en) * 1981-04-02 1982-10-13 Sumitomo Electric Industries Manufacture of non-oxide ceramics
JPS5822302A (ja) * 1981-07-30 1983-02-09 Nippon Steel Corp 水素吸蔵金属の活性化処理方法
JPS5881971A (ja) * 1981-11-11 1983-05-17 Matsushita Electric Ind Co Ltd 着膜装置
JPS58100601A (ja) * 1981-12-09 1983-06-15 Japan Synthetic Rubber Co Ltd 被覆超微粒子またはその膜並びに形成方法及び装置

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0192373A (ja) * 1987-09-30 1989-04-11 Ishikawajima Harima Heavy Ind Co Ltd 比表面積の大きい原料へのｃｖｄによるカーボン薄膜製造方法
JP2002060943A (ja) * 2000-08-22 2002-02-28 Tohoku Electric Power Co Inc 高純度シリコンの被覆方法及び装置
JP2008169421A (ja) * 2007-01-10 2008-07-24 Tsubaki Emerson Co Ｄｌｃ成膜装置
JP2009256804A (ja) * 2009-08-03 2009-11-05 Utec:Kk 微粒子
JP2017075391A (ja) * 2015-08-31 2017-04-20 ウルトラテック インク 回転反応管を有するプラズマ助長原子層堆積システム
EP3484810A4 (en) * 2016-07-15 2020-03-25 Oned Material LLC METHOD AND DEVICE FOR PRODUCING SILICON NANO WIRE ON CARBON-BASED POWDER FOR USE IN BATTERIES
US10862114B2 (en) 2016-07-15 2020-12-08 Oned Material Llc Manufacturing apparatus and method for making silicon nanowires on carbon based powders for use in batteries
EP3778471A1 (en) * 2016-07-15 2021-02-17 OneD Material, Inc. Manufacturing method for making silicon nanowires on carbon based powders for use in batteries
US11728477B2 (en) 2016-07-15 2023-08-15 Oned Material, Inc. Manufacturing apparatus and method for making silicon nanowires on carbon based powders for use in batteries
EP4273296A1 (en) * 2016-07-15 2023-11-08 OneD Material, Inc. Manufacturing apparatus and method for making silicon nanowires on carbon based powders for use in batteries
EP4292702A3 (en) * 2016-07-15 2024-04-17 OneD Material, Inc. Manufacturing apparatus and method for making silicon nanowires on carbon based powders for use in batteries
JP2020084222A (ja) * 2018-11-16 2020-06-04 日本化学工業株式会社 被覆粒子の製造方法

Also Published As

Publication number Publication date
JPH024642B2 (enExample) 1990-01-30

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